JPS62203263U - - Google Patents
Info
- Publication number
- JPS62203263U JPS62203263U JP9183986U JP9183986U JPS62203263U JP S62203263 U JPS62203263 U JP S62203263U JP 9183986 U JP9183986 U JP 9183986U JP 9183986 U JP9183986 U JP 9183986U JP S62203263 U JPS62203263 U JP S62203263U
- Authority
- JP
- Japan
- Prior art keywords
- basket
- basket portion
- lead
- lead portion
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の第１の実施例の説明図、第２
図は本考案の第２の実施例の説明図、第３図は従
来例の説明図である。
１１……真空蒸着用バスケツト、１１ａ……バ
スケツト部、１１ｂ，１５ａ……リード部、１２
……電極部、１３……蒸着材料、１４……試料、
１５……板部。
Figure 1 is an explanatory diagram of the first embodiment of the present invention;
The figure is an explanatory diagram of a second embodiment of the present invention, and FIG. 3 is an explanatory diagram of a conventional example. 11...basket for vacuum deposition, 11a...basket part, 11b, 15a...lead part, 12
... Electrode part, 13 ... Vapor deposition material, 14 ... Sample,
15... Itabe.
Claims (1)
ケツト部両端より外方に伸長するリード部と、こ
のリード部に接続され上記バスケツト部の上方位
置にて水平方向に配置される高融点材料の板部と
を具備することを特徴とする真空蒸着用蒸発源。 A basket portion for heating the vapor deposition material, a lead portion extending outward from both ends of the basket portion, and a plate portion of a high melting point material connected to the lead portion and disposed horizontally above the basket portion. An evaporation source for vacuum evaporation, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9183986U JPS62203263U (en) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9183986U JPS62203263U (en) | 1986-06-18 | 1986-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203263U true JPS62203263U (en) | 1987-12-25 |
Family
ID=30952987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9183986U Pending JPS62203263U (en) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203263U (en) |
-
1986
- 1986-06-18 JP JP9183986U patent/JPS62203263U/ja active Pending