JPS6164160U - - Google Patents
Info
- Publication number
- JPS6164160U JPS6164160U JP14754384U JP14754384U JPS6164160U JP S6164160 U JPS6164160 U JP S6164160U JP 14754384 U JP14754384 U JP 14754384U JP 14754384 U JP14754384 U JP 14754384U JP S6164160 U JPS6164160 U JP S6164160U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- vapor deposition
- boat
- boat body
- accommodates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の１実施例である蒸着ボート
の外観斜視図、第２図はこの蒸着ボートの作動状
態を示す模式説明図、第３図、第４図は従来の蒸
着ボートの、それぞれ作動状態を示す模式説明図
である。
１，１′…被蒸着板（アルミニウム基板）、２
…蒸着ボート本体、４…カバー、５…操作用腕。
Fig. 1 is an external perspective view of a vapor deposition boat that is an embodiment of this invention, Fig. 2 is a schematic explanatory diagram showing the operating state of this vapor deposition boat, and Figs. 3 and 4 are views of a conventional vapor deposition boat, respectively. FIG. 3 is a schematic explanatory diagram showing an operating state. 1, 1'...Deposition plate (aluminum substrate), 2
...Deposition boat body, 4...Cover, 5...Operation arm.
Claims (1)
本体と同一材料からなり、前記本体の開口部に摺
動自在に係合されるカバーと、このカバーに連設
し、前記カバーを外部から摺動させる腕部とから
なる蒸着用ボート。 a boat body that accommodates a vapor deposition substance; a cover made of the same material as the boat body and slidably engaged with the opening of the body; and a cover that is connected to the cover and is slidable from the outside. A vapor deposition boat consisting of an arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14754384U JPH0210118Y2 (en) | 1984-09-29 | 1984-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14754384U JPH0210118Y2 (en) | 1984-09-29 | 1984-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164160U true JPS6164160U (en) | 1986-05-01 |
| JPH0210118Y2 JPH0210118Y2 (en) | 1990-03-13 |
Family
ID=30705768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14754384U Expired JPH0210118Y2 (en) | 1984-09-29 | 1984-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210118Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005029895A (en) * | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | Vapor deposition apparatus |
| JP2012184453A (en) * | 2011-03-03 | 2012-09-27 | Seiko Epson Corp | Vapor deposition apparatus |
-
1984
- 1984-09-29 JP JP14754384U patent/JPH0210118Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005029895A (en) * | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | Vapor deposition apparatus |
| JP2012184453A (en) * | 2011-03-03 | 2012-09-27 | Seiko Epson Corp | Vapor deposition apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0210118Y2 (en) | 1990-03-13 |