JPS61123532U - - Google Patents
Info
- Publication number
- JPS61123532U JPS61123532U JP787685U JP787685U JPS61123532U JP S61123532 U JPS61123532 U JP S61123532U JP 787685 U JP787685 U JP 787685U JP 787685 U JP787685 U JP 787685U JP S61123532 U JPS61123532 U JP S61123532U
- Authority
- JP
- Japan
- Prior art keywords
- vaporization
- vaporization chamber
- main body
- coupled
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008016 vaporization Effects 0.000 claims description 7
- 238000009834 vaporization Methods 0.000 claims description 7
- 239000006200 vaporizer Substances 0.000 claims description 4
- 238000010790 dilution Methods 0.000 claims description 3
- 239000012895 dilution Substances 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図および第２図はそれぞれ従来の気化装置
の断面図、第３図は本考案の実施例になる気化装
置の断面図である。
図中、６，８，１０はバルブ、１２は気化器本
体、１３は恒温槽、１４は気化室、１５は希釈室
、１６は仕切板、１７は細孔を示す。
1 and 2 are sectional views of a conventional vaporizer, respectively, and FIG. 3 is a sectional view of a vaporizer according to an embodiment of the present invention. In the figure, 6, 8, and 10 are valves, 12 is a vaporizer main body, 13 is a constant temperature bath, 14 is a vaporization chamber, 15 is a dilution chamber, 16 is a partition plate, and 17 is a pore.
Claims (1)
入管を結合した気化室と、この気化室と一体に設
けられ、希釈ガスの導入管と送出管が結合され、
細孔を介して気化室と連通した希釈室とで気化器
容器本体が構成され、該容器本体が恒温槽内に保
持されていることを特徴とする気相成長用気化装
置。 a vaporization chamber containing a source material to be vaporized and coupled with a vaporization gas introduction pipe; a vaporization chamber provided integrally with the vaporization chamber and coupled with a dilution gas introduction pipe and a delivery pipe;
A vaporization apparatus for vapor phase growth, characterized in that a vaporizer container main body is constituted by a dilution chamber communicating with a vaporization chamber through a pore, and the container main body is held in a constant temperature bath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787685U JPS61123532U (en) | 1985-01-22 | 1985-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787685U JPS61123532U (en) | 1985-01-22 | 1985-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123532U true JPS61123532U (en) | 1986-08-04 |
Family
ID=30486634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP787685U Pending JPS61123532U (en) | 1985-01-22 | 1985-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123532U (en) |
-
1985
- 1985-01-22 JP JP787685U patent/JPS61123532U/ja active Pending