JPS6413722U - - Google Patents
Info
- Publication number
- JPS6413722U JPS6413722U JP11015187U JP11015187U JPS6413722U JP S6413722 U JPS6413722 U JP S6413722U JP 11015187 U JP11015187 U JP 11015187U JP 11015187 U JP11015187 U JP 11015187U JP S6413722 U JPS6413722 U JP S6413722U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- concentration detector
- gas concentration
- supply line
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
図は本考案の実施例を示す模式図である。
１……ガス供給ライン、７，８……第１、第２
のバルブ、９……反応管、１０……ガス濃度検出
計。
The figure is a schematic diagram showing an embodiment of the present invention. 1...Gas supply line, 7, 8...1st, 2nd
valve, 9... reaction tube, 10... gas concentration detector.
Claims (1)
濃度検出計に分岐接続された原料ガス供給ライン
、該供給ラインを介して供給される原料ガスを上
記反応管もしくはガス濃度検出計に選択供給する
手段を備えたことを特徴とする気相成長装置。 A reaction tube, a gas concentration detector, a raw material gas supply line branched and connected to the reaction tube and the gas concentration detector, selectively supplying the raw material gas supplied via the supply line to the reaction tube or gas concentration detector. A vapor phase growth apparatus characterized by comprising means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11015187U JPS6413722U (en) | 1987-07-17 | 1987-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11015187U JPS6413722U (en) | 1987-07-17 | 1987-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413722U true JPS6413722U (en) | 1989-01-24 |
Family
ID=31347044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11015187U Pending JPS6413722U (en) | 1987-07-17 | 1987-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413722U (en) |
-
1987
- 1987-07-17 JP JP11015187U patent/JPS6413722U/ja active Pending