JPH0210470U - - Google Patents
Info
- Publication number
- JPH0210470U JPH0210470U JP8426588U JP8426588U JPH0210470U JP H0210470 U JPH0210470 U JP H0210470U JP 8426588 U JP8426588 U JP 8426588U JP 8426588 U JP8426588 U JP 8426588U JP H0210470 U JPH0210470 U JP H0210470U
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- gas
- tube
- growth
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来装置を示す断面図である。
１…反応管、２…加熱炉、３，４…成長室、５
，６…原料ソース、７，８…原料ガス導入管、９
…基板保持治具、１０…基板、１１…内管。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a sectional view showing a conventional device. 1... Reaction tube, 2... Heating furnace, 3, 4... Growth chamber, 5
, 6... Raw material source, 7, 8... Raw material gas introduction pipe, 9
...Substrate holding jig, 10...Substrate, 11...Inner tube.
Claims (1)
のガスが通る成長室下流側の反応管の内周に、反
応後のガスから該反応管を隔離させる内管を設置
したことを特徴とする気相エピタキシアル成長装
置。 A vapor phase epitaxial growth apparatus, characterized in that an inner tube is installed on the inner periphery of the reaction tube on the downstream side of the growth chamber through which the gas after the reaction passes, to isolate the reaction tube from the gas after the reaction. al growth equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8426588U JPH0210470U (en) | 1988-06-25 | 1988-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8426588U JPH0210470U (en) | 1988-06-25 | 1988-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0210470U true JPH0210470U (en) | 1990-01-23 |
Family
ID=31308962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8426588U Pending JPH0210470U (en) | 1988-06-25 | 1988-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210470U (en) |
-
1988
- 1988-06-25 JP JP8426588U patent/JPH0210470U/ja active Pending
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