JPH0246868U - - Google Patents
Info
- Publication number
- JPH0246868U JPH0246868U JP12428488U JP12428488U JPH0246868U JP H0246868 U JPH0246868 U JP H0246868U JP 12428488 U JP12428488 U JP 12428488U JP 12428488 U JP12428488 U JP 12428488U JP H0246868 U JPH0246868 U JP H0246868U
- Authority
- JP
- Japan
- Prior art keywords
- growth
- utility
- mounting surface
- registration request
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Description
第１図は本考案の実施例１を示す縦断面図、第
２図は本考案の実施例２を示す縦断面図、第３図
は従来例を示す縦断面図である。
１……反応管、２……加熱炉、３，４……成長
室、５，６……原料ソース、７，８……原料ガス
導入管、９……基板ホルダ、９ｃ……凹部、１０
……基板。
FIG. 1 is a vertical cross-sectional view showing a first embodiment of the present invention, FIG. 2 is a vertical cross-sectional view showing a second embodiment of the present invention, and FIG. 3 is a vertical cross-sectional view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Reaction tube, 2... Heating furnace, 3, 4... Growth chamber, 5, 6... Raw material source, 7, 8... Raw material gas introduction tube, 9... Substrate holder, 9c... Recess, 10
……substrate.
Claims (1)
装置において、前記成長室に向き合う基板ホルダ
の基板搭載面の形状を平坦構造としたことを特徴
とする気相エピタキシアル成長装置。 A vapor phase epitaxial growth apparatus having a plurality of growth chambers, characterized in that a substrate mounting surface of a substrate holder facing the growth chamber has a flat structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12428488U JPH0246868U (en) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12428488U JPH0246868U (en) | 1988-09-22 | 1988-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246868U true JPH0246868U (en) | 1990-03-30 |
Family
ID=31373887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12428488U Pending JPH0246868U (en) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246868U (en) |
-
1988
- 1988-09-22 JP JP12428488U patent/JPH0246868U/ja active Pending