JPS6219731U - - Google Patents
Info
- Publication number
- JPS6219731U JPS6219731U JP11116385U JP11116385U JPS6219731U JP S6219731 U JPS6219731 U JP S6219731U JP 11116385 U JP11116385 U JP 11116385U JP 11116385 U JP11116385 U JP 11116385U JP S6219731 U JPS6219731 U JP S6219731U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- holding
- heating
- thin film
- film growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
Description
第１図はこの考案の半導体薄膜成長装置の１実
施例の断面図、第２図は従来の半導体薄膜成長装
置の断面図である。
１０……反応管、１２……原料ガス導体口、１
３……ガス排出口、１７……半導体基板、１９…
…保持手段、２０……高周波誘導加熱コイル。
FIG. 1 is a sectional view of one embodiment of the semiconductor thin film growth apparatus of this invention, and FIG. 2 is a sectional view of a conventional semiconductor thin film growth apparatus. 10... Reaction tube, 12... Raw material gas conductor port, 1
3...Gas exhaust port, 17...Semiconductor substrate, 19...
...Holding means, 20...High frequency induction heating coil.
Claims (1)
およびガス排出口が形成された反応管と、前記反
応管内に設けられ半導体基板を下向きに保持する
保持手段と、前記基板を加熱する加熱手段とを備
えた半導体薄膜成長装置。 A reaction tube having a raw material gas inlet and a gas outlet formed at a lower end and an upper end, respectively, a holding means provided in the reaction tube for holding a semiconductor substrate facing downward, and a heating means for heating the substrate. Semiconductor thin film growth equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116385U JPS6219731U (en) | 1985-07-20 | 1985-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116385U JPS6219731U (en) | 1985-07-20 | 1985-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6219731U true JPS6219731U (en) | 1987-02-05 |
Family
ID=30990829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11116385U Pending JPS6219731U (en) | 1985-07-20 | 1985-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6219731U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936551A (en) * | 1972-06-29 | 1974-04-04 | ||
| JPS5713795U (en) * | 1980-06-30 | 1982-01-23 |
-
1985
- 1985-07-20 JP JP11116385U patent/JPS6219731U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936551A (en) * | 1972-06-29 | 1974-04-04 | ||
| JPS5713795U (en) * | 1980-06-30 | 1982-01-23 |
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