JPS6418729U - - Google Patents
Info
- Publication number
- JPS6418729U JPS6418729U JP11267087U JP11267087U JPS6418729U JP S6418729 U JPS6418729 U JP S6418729U JP 11267087 U JP11267087 U JP 11267087U JP 11267087 U JP11267087 U JP 11267087U JP S6418729 U JPS6418729 U JP S6418729U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- lamp
- annealing
- setting
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
Description
第１図は本考案の実施例を示すアニール装置の
構成図、第２図は第１図の―線断面図である
。
１……石英チユーブ、２……ランプ、３……ウ
エハ、４……ウエハ支持器、５……石英蓋、６…
…パイロメータ、７……ガス導入口、８……排気
口。
FIG. 1 is a block diagram of an annealing apparatus showing an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line -- in FIG. 1... Quartz tube, 2... Lamp, 3... Wafer, 4... Wafer supporter, 5... Quartz lid, 6...
...Pyrometer, 7...Gas inlet, 8...Exhaust port.
Claims (1)
支持器と、 (b) それらの各ウエハの上下に配置可能な回転
機構を具備するランプと、 (c) 同時に複数のウエハを短時間ランプアニー
ルする手段を具備するようにしたことを特徴とす
るアニール装置。[Claims for Utility Model Registration] (a) A wafer supporter for setting a plurality of wafers in a multi-tiered manner; (b) A lamp equipped with a rotation mechanism that can be placed above and below each of the wafers; (c) At the same time. An annealing apparatus characterized by comprising means for lamp annealing a plurality of wafers for a short time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11267087U JPS6418729U (en) | 1987-07-24 | 1987-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11267087U JPS6418729U (en) | 1987-07-24 | 1987-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418729U true JPS6418729U (en) | 1989-01-30 |
Family
ID=31351818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11267087U Pending JPS6418729U (en) | 1987-07-24 | 1987-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418729U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014130900A (en) * | 2012-12-28 | 2014-07-10 | Shimadzu Corp | Heater |
-
1987
- 1987-07-24 JP JP11267087U patent/JPS6418729U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014130900A (en) * | 2012-12-28 | 2014-07-10 | Shimadzu Corp | Heater |