JPH0256434U - - Google Patents
Info
- Publication number
- JPH0256434U JPH0256434U JP13582488U JP13582488U JPH0256434U JP H0256434 U JPH0256434 U JP H0256434U JP 13582488 U JP13582488 U JP 13582488U JP 13582488 U JP13582488 U JP 13582488U JP H0256434 U JPH0256434 U JP H0256434U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- holds
- incorporated
- thermocouple
- type semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Description
第１図ａ〜ｃは本考案の実施例の概略図（ボー
トを保持する部分に熱電対が組み込まれているも
の）、ａ，ｂ，ｃはボートが反応炉へ出し入れさ
れる経過を示している。第２図ａ〜ｃは本考案の
実施例の概略図（ボートに熱電対が組み込まれて
いるもの）、ａ，ｂ，ｃはボートが反応炉へ出し
入れされる経過を示している。第３図、第４図は
従来の実施例の概略図。
１……ヒータ、２……反応炉、３……熱電対（
反応炉外）、４……ウエハ、５……ウエハボート
、６……ボート保持部（反応炉フタ）、７……熱
電対（反応炉内）、８……熱電対カバー。
Figures 1 a to c are schematic diagrams of an embodiment of the present invention (a thermocouple is incorporated in the part that holds the boat), and figures a, b, and c show the progress of the boat being taken in and out of the reactor. There is. Figures 2a to 2c are schematic diagrams of an embodiment of the present invention (in which a thermocouple is incorporated into a boat), and Figures 2a, 2b, and 2c show the progress of the boat being taken in and out of the reactor. FIGS. 3 and 4 are schematic diagrams of conventional embodiments. 1... Heater, 2... Reactor, 3... Thermocouple (
(outside the reactor), 4... wafer, 5... wafer boat, 6... boat holding part (reactor lid), 7... thermocouple (inside the reactor), 8... thermocouple cover.
Claims (1)
を保持するボートまたはボートを保持する部分に
、温度測定用熱電対が組み込まれていることを特
徴とする半導体製造装置。 1. A vertical diffusion furnace type semiconductor manufacturing apparatus, characterized in that a temperature measuring thermocouple is incorporated in a boat that holds wafers or a part that holds the boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13582488U JPH0256434U (en) | 1988-10-18 | 1988-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13582488U JPH0256434U (en) | 1988-10-18 | 1988-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0256434U true JPH0256434U (en) | 1990-04-24 |
Family
ID=31395769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13582488U Pending JPH0256434U (en) | 1988-10-18 | 1988-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0256434U (en) |
-
1988
- 1988-10-18 JP JP13582488U patent/JPH0256434U/ja active Pending