JPH0339833U - - Google Patents
Info
- Publication number
- JPH0339833U JPH0339833U JP10086989U JP10086989U JPH0339833U JP H0339833 U JPH0339833 U JP H0339833U JP 10086989 U JP10086989 U JP 10086989U JP 10086989 U JP10086989 U JP 10086989U JP H0339833 U JPH0339833 U JP H0339833U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- divided
- heats
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
Description
第１図は本考案機構の一実施例の構成を示す断
面図、第２図は従来機構の一例の構成を示す断面
図である。
１…熱源、２…カバー、３…サセプタ、３ａ…
周部の（第１）サセプタ部、３ｂ…中心部の（第
２）サセプタ部、３ｂ１…軸、５…ウエーハ。
FIG. 1 is a sectional view showing the structure of an embodiment of the mechanism of the present invention, and FIG. 2 is a sectional view showing the structure of an example of the conventional mechanism. 1... Heat source, 2... Cover, 3... Susceptor, 3a...
(first) susceptor part at the periphery, 3b... (second) susceptor part at the center, 3b 1 ... shaft, 5... wafer.
Claims (1)
することで、サセプタ３上のウエーハ５を加熱し
半導体を製造する装置において、ウエーハ５を載
置するサセプタ３を同心円状に分割し、この分割
した中心部のサセプタ部３ｂの軸３ｂ１を上下移
動機構に連結せしめてなる枚葉式半導体製造装置
のウエーハ押し上げ機構。 In an apparatus that uses a susceptor 3 as an object to be heated and heats the wafer 5 on the susceptor 3 to manufacture a semiconductor, the susceptor 3 on which the wafer 5 is placed is divided into concentric circles, and the divided A wafer lifting mechanism for a single-wafer type semiconductor manufacturing apparatus, in which a shaft 3b1 of a central susceptor part 3b is connected to a vertical movement mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10086989U JPH0339833U (en) | 1989-08-28 | 1989-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10086989U JPH0339833U (en) | 1989-08-28 | 1989-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339833U true JPH0339833U (en) | 1991-04-17 |
Family
ID=31649852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10086989U Pending JPH0339833U (en) | 1989-08-28 | 1989-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339833U (en) |
-
1989
- 1989-08-28 JP JP10086989U patent/JPH0339833U/ja active Pending
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