JPS59109133U - Infrared heat treatment equipment - Google Patents
Infrared heat treatment equipmentInfo
- Publication number
- JPS59109133U JPS59109133U JP314683U JP314683U JPS59109133U JP S59109133 U JPS59109133 U JP S59109133U JP 314683 U JP314683 U JP 314683U JP 314683 U JP314683 U JP 314683U JP S59109133 U JPS59109133 U JP S59109133U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment equipment
- substrate
- infrared heat
- support stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａ、 ｂは、従来例を説明するための断面図及び
要部平面図、第２図ａ、 ｂ、第３図ａ、 ｂ。
第４図ａ、 ｂは、本考案を説明するための断面図及び
要部平面図である。−
１・・・主ヒゴー、２・・・ジャツレ−１３・・・保持
台、４・・・半導体基板、６・・・補助ヒーター。
Ｃα） 第３図 −（ｂツ
ク
゛ 第４図FIGS. 1a and 1b are a cross-sectional view and a plan view of essential parts for explaining a conventional example, FIGS. 2a and 2b, and 3a and 3b. FIGS. 4a and 4b are a sectional view and a plan view of essential parts for explaining the present invention. - 1... Main higo, 2... Jatsure-13... Holding stand, 4... Semiconductor substrate, 6... Auxiliary heater. Cα) Fig. 3 - (b Tsuk゛ Fig. 4
Claims (2)
面に対抗して設けられた主ヒーターと、上記支持台の上
記基板の設置部分周辺に設けられた補助ヒーターとを有
する赤外線加熱処理装置。(1) An infrared ray having a support stand on which a substrate to be heated is installed, a main heater provided opposite the main surface of the substrate, and an auxiliary heater provided around the part of the support stand where the substrate is installed. Heat treatment equipment.
用新案登録請求の範囲第１項記載の赤外線加熱−処廟装
置。(2) The infrared heating and mausoleum device according to claim 1, wherein the auxiliary heater is provided on the side surface of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP314683U JPS59109133U (en) | 1983-01-12 | 1983-01-12 | Infrared heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP314683U JPS59109133U (en) | 1983-01-12 | 1983-01-12 | Infrared heat treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59109133U true JPS59109133U (en) | 1984-07-23 |
Family
ID=30134776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP314683U Pending JPS59109133U (en) | 1983-01-12 | 1983-01-12 | Infrared heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109133U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61156742A (en) * | 1984-12-28 | 1986-07-16 | Toshiba Corp | Short period heat treatment device |
-
1983
- 1983-01-12 JP JP314683U patent/JPS59109133U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61156742A (en) * | 1984-12-28 | 1986-07-16 | Toshiba Corp | Short period heat treatment device |
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