JPS5991694U - Infrared heat treatment equipment - Google Patents
Infrared heat treatment equipmentInfo
- Publication number
- JPS5991694U JPS5991694U JP18882982U JP18882982U JPS5991694U JP S5991694 U JPS5991694 U JP S5991694U JP 18882982 U JP18882982 U JP 18882982U JP 18882982 U JP18882982 U JP 18882982U JP S5991694 U JPS5991694 U JP S5991694U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment equipment
- infrared heat
- semiconductor substrate
- support stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来例を説明するための断面図、第２図Ｊ第３
図は本考案の実施例を説明するための断面図である。
１・・・・・・グラファイトヒーター、２・・・・・・
シャッター、３・・・・・・支持台、４・・・・・・半
導体基板、５・・・・・・凹部。Figure 1 is a sectional view for explaining the conventional example, Figure 2
The figure is a sectional view for explaining an embodiment of the present invention. 1...Graphite heater, 2...
Shutter, 3... Support stand, 4... Semiconductor substrate, 5... Concave portion.
Claims (1)
される半導体基板を支持する支持台とを有し、前記支持
台には前記半導体基板を収納する凹部が設けられている
ことを特徴とする赤外線加熱処理装置。The device is characterized in that it has a heating section that heats a semiconductor substrate, and a support stand that supports the semiconductor substrate heated by the heating section, and that the support stand is provided with a recess that accommodates the semiconductor substrate. Infrared heat treatment equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18882982U JPS5991694U (en) | 1982-12-13 | 1982-12-13 | Infrared heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18882982U JPS5991694U (en) | 1982-12-13 | 1982-12-13 | Infrared heat treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5991694U true JPS5991694U (en) | 1984-06-21 |
Family
ID=30407266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18882982U Pending JPS5991694U (en) | 1982-12-13 | 1982-12-13 | Infrared heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5991694U (en) |
-
1982
- 1982-12-13 JP JP18882982U patent/JPS5991694U/en active Pending
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