JPS5991693U - Infrared heat treatment equipment - Google Patents
Infrared heat treatment equipmentInfo
- Publication number
- JPS5991693U JPS5991693U JP18882882U JP18882882U JPS5991693U JP S5991693 U JPS5991693 U JP S5991693U JP 18882882 U JP18882882 U JP 18882882U JP 18882882 U JP18882882 U JP 18882882U JP S5991693 U JPS5991693 U JP S5991693U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- infrared heat
- semiconductor substrate
- treatment equipment
- support stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来装置の基本的構造の概要断面図、第２図は
本考案実施例装置の基本的構造の概要断面図、第３図は
同装置の平面概略図、第４図は本考案の他の実施例装置
の要部概要断面図である。
１・・・・・・グラファイトヒータ、２・・・・・・シ
ャッタ、３・・・・・・支持台、４・・・・・・被処理
用基板、６・・・・・・凹状部。Fig. 1 is a schematic cross-sectional view of the basic structure of the conventional device, Fig. 2 is a schematic cross-sectional view of the basic structure of the device according to the present invention, Fig. 3 is a schematic plan view of the same device, and Fig. 4 is the schematic cross-sectional view of the basic structure of the device according to the present invention. FIG. 3 is a schematic cross-sectional view of main parts of another embodiment of the device. 1...Graphite heater, 2...Shutter, 3...Support stand, 4...Substrate to be processed, 6...Concave portion .
Claims (1)
される半導体基板を支持する支持台とを有し、前記支持
台の前記半導体基板を載置する載置部には前記半導体基
板径より径小な凹状部を有する赤外線加熱処理装置。It has a heating part that heats a semiconductor substrate, and a support stand that supports the semiconductor substrate heated by the heating part, and a mounting part of the support stand on which the semiconductor substrate is placed has a diameter smaller than the diameter of the semiconductor substrate. An infrared heat treatment device with a small concave part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18882882U JPS5991693U (en) | 1982-12-13 | 1982-12-13 | Infrared heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18882882U JPS5991693U (en) | 1982-12-13 | 1982-12-13 | Infrared heat treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5991693U true JPS5991693U (en) | 1984-06-21 |
Family
ID=30407264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18882882U Pending JPS5991693U (en) | 1982-12-13 | 1982-12-13 | Infrared heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5991693U (en) |
-
1982
- 1982-12-13 JP JP18882882U patent/JPS5991693U/en active Pending
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