JPS6048170U

JPS6048170U - Presiakutska bias test device

Info

Publication number: JPS6048170U
Application number: JP5845683U
Authority: JP
Inventors: 幸仁池田; 有賀　秀和
Original assignee: 日本電気株式会社
Priority date: 1983-04-19
Filing date: 1983-04-19
Publication date: 1985-04-04

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図ａは従来のプレシャクツカバイアス試験装置の構
造を示す断面図、第１図すは従来の試験装置への加熱開
始時における槽内雰囲気及び被試験素子の温度上昇を示
すグラフである。第２図ａは本考案の一実施例によるプ
レシャクツカバイアス試験装置の構造の断面図、第２図
すは、本考案の試験装置の加熱開始時における槽内雰囲
気及び被試験素子の温度上昇を示すグラフである。１・・・試験槽、２・・・水、３・・・加熱用ヒータ、
４・・・ヒータ用電源、５・・・ヒータ制御回路、６・
・・槽内温度検知用熱電対、７・・・バイアス用基板、
８・・・素子取付はソケット、９・・・被試験素子、１
０・・・被試験素子バイアス電源、１１・・・支持台加
熱用ヒータ、１２・・・ヒータ制御回路、１３・・・支
持台温度検知用熱電対、１４・・・基板支持台。FIG. 1a is a cross-sectional view showing the structure of a conventional preshakutsuka bias test device, and FIG. 1 is a graph showing the temperature rise of the atmosphere in the tank and the device under test at the start of heating of the conventional test device. Fig. 2a is a cross-sectional view of the structure of a preshakutsuka bias test device according to an embodiment of the present invention, and Fig. 2a shows the temperature rise of the atmosphere in the tank and the device under test at the start of heating of the test device of the present invention. This is a graph showing. 1...Test tank, 2...Water, 3...Heating heater,
4... Power source for heater, 5... Heater control circuit, 6...
...Thermocouple for detecting temperature inside the tank, 7... Bias substrate,
8... Element mounting is in socket, 9... Element under test, 1
0... Element under test bias power supply, 11... Heater for heating the support stand, 12... Heater control circuit, 13... Thermocouple for detecting the temperature of the support stand, 14... Substrate support stand.

Claims

[Scope of utility model registration request]

In addition to the control circuit that directly heats and controls the water in the test chamber, there is also a built-in heater and thermocouple directly below the device under test mounting section in the test chamber, and a control circuit for heating this heater. A pre-sharkutsuka bias test device characterized by comprising a control circuit.