JPS6244279U - - Google Patents
Info
- Publication number
- JPS6244279U JPS6244279U JP13641985U JP13641985U JPS6244279U JP S6244279 U JPS6244279 U JP S6244279U JP 13641985 U JP13641985 U JP 13641985U JP 13641985 U JP13641985 U JP 13641985U JP S6244279 U JPS6244279 U JP S6244279U
- Authority
- JP
- Japan
- Prior art keywords
- test
- semiconductor device
- voltage application
- heater block
- brought
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す縦断面図、第
２図は従来式の高温動作あるいは高温電圧印加試
験装置を示す縦断面図である。
１……被試験半導体装置、２……ヒータブロツ
ク、２ａ……ヒータ、２ｂ……温度センサ、３ａ
……スプリング、３ｂ……押え金具、４……リー
ド挿入用ソケツト、５……バイアス印加用電源、
６……温度コントロールユニツト。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing a conventional high temperature operation or high temperature voltage application test apparatus. DESCRIPTION OF SYMBOLS 1... Semiconductor device under test, 2... Heater block, 2a... Heater, 2b... Temperature sensor, 3a
...Spring, 3b... Holding metal fitting, 4... Socket for lead insertion, 5... Power supply for bias application,
6...Temperature control unit.
Claims (1)
加試験を実施する試験装置において、被試験半導
体装置に温度コントローラを有するヒーターブロ
ツクを直接接触させたことを特徴とする半導体装
置の試験装置。 1. A test device for a semiconductor device that performs an operation test or a voltage application test of a semiconductor device at high temperatures, and is characterized in that a heater block having a temperature controller is brought into direct contact with the semiconductor device under test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13641985U JPS6244279U (en) | 1985-09-06 | 1985-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13641985U JPS6244279U (en) | 1985-09-06 | 1985-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6244279U true JPS6244279U (en) | 1987-03-17 |
Family
ID=31039512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13641985U Pending JPS6244279U (en) | 1985-09-06 | 1985-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244279U (en) |
-
1985
- 1985-09-06 JP JP13641985U patent/JPS6244279U/ja active Pending