JPS60364U - Substrate heating device - Google Patents
Substrate heating deviceInfo
- Publication number
- JPS60364U JPS60364U JP9123183U JP9123183U JPS60364U JP S60364 U JPS60364 U JP S60364U JP 9123183 U JP9123183 U JP 9123183U JP 9123183 U JP9123183 U JP 9123183U JP S60364 U JPS60364 U JP S60364U
- Authority
- JP
- Japan
- Prior art keywords
- heating device
- substrate heating
- vapor deposition
- substrate
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図A、 B、 Cは従来の加熱装置を示す断面図、
第2図は本考案の一実施例を示す縦断側面図、第3図は
第2図■−■線相当部分の断面図、第4図は昇温時間と
設定時間へのコントロールレスポンスを示すグラフ、第
5図は加熱効率を示すグラフである。
1・・・ベースプレート、2・・・支持杆、3・・・加
熱ヒータ、4・・・基板、5・・・基板回転用フランジ
、7・・・モータ、10・・・回転部材、11・・・キ
ャップ。FIGS. 1A, B, and C are cross-sectional views showing a conventional heating device;
Fig. 2 is a longitudinal side view showing an embodiment of the present invention, Fig. 3 is a cross-sectional view of the portion corresponding to the line ■-■ in Fig. 2, and Fig. 4 is a graph showing control response to temperature rise time and set time. , FIG. 5 is a graph showing heating efficiency. DESCRIPTION OF SYMBOLS 1... Base plate, 2... Support rod, 3... Heater, 4... Board, 5... Flange for board rotation, 7... Motor, 10... Rotating member, 11... ··cap.
Claims (1)
基板を嵌合する支持杆の周面に赤外ヒータ、熱電子銃等
の熱容量の小さい加熱源を配設したことを特徴とする基
板の加熱装置。A vapor deposition apparatus for vapor deposition on a cylindrical substrate, characterized in that a heating source with a small heat capacity such as an infrared heater or a thermionic gun is disposed on the circumferential surface of a support rod into which the substrate is fitted. Device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9123183U JPS60364U (en) | 1983-06-16 | 1983-06-16 | Substrate heating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9123183U JPS60364U (en) | 1983-06-16 | 1983-06-16 | Substrate heating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60364U true JPS60364U (en) | 1985-01-05 |
Family
ID=30221216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9123183U Pending JPS60364U (en) | 1983-06-16 | 1983-06-16 | Substrate heating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60364U (en) |
-
1983
- 1983-06-16 JP JP9123183U patent/JPS60364U/en active Pending
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