JPS60364U - Substrate heating device - Google Patents

Substrate heating device

Info

Publication number
JPS60364U
JPS60364U JP9123183U JP9123183U JPS60364U JP S60364 U JPS60364 U JP S60364U JP 9123183 U JP9123183 U JP 9123183U JP 9123183 U JP9123183 U JP 9123183U JP S60364 U JPS60364 U JP S60364U
Authority
JP
Japan
Prior art keywords
heating device
substrate heating
vapor deposition
substrate
support rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9123183U
Other languages
Japanese (ja)
Inventor
成人 小島
Original Assignee
株式会社リコー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社リコー filed Critical 株式会社リコー
Priority to JP9123183U priority Critical patent/JPS60364U/en
Publication of JPS60364U publication Critical patent/JPS60364U/en
Pending legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図Ａ、　Ｂ、　Ｃは従来の加熱装置を示す断面図、
第２図は本考案の一実施例を示す縦断側面図、第３図は
第２図■−■線相当部分の断面図、第４図は昇温時間と
設定時間へのコントロールレスポンスを示すグラフ、第
５図は加熱効率を示すグラフである。 １・・・ベースプレート、２・・・支持杆、３・・・加
熱ヒータ、４・・・基板、５・・・基板回転用フランジ
、７・・・モータ、１０・・・回転部材、１１・・・キ
ャップ。FIGS. 1A, B, and C are cross-sectional views showing a conventional heating device;
Fig. 2 is a longitudinal side view showing an embodiment of the present invention, Fig. 3 is a cross-sectional view of the portion corresponding to the line ■-■ in Fig. 2, and Fig. 4 is a graph showing control response to temperature rise time and set time. , FIG. 5 is a graph showing heating efficiency. DESCRIPTION OF SYMBOLS 1... Base plate, 2... Support rod, 3... Heater, 4... Board, 5... Flange for board rotation, 7... Motor, 10... Rotating member, 11... ··cap.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] シリンダ型基板への蒸着を行なう蒸着装置において、該
基板を嵌合する支持杆の周面に赤外ヒータ、熱電子銃等
の熱容量の小さい加熱源を配設したことを特徴とする基
板の加熱装置。A vapor deposition apparatus for vapor deposition on a cylindrical substrate, characterized in that a heating source with a small heat capacity such as an infrared heater or a thermionic gun is disposed on the circumferential surface of a support rod into which the substrate is fitted. Device.
JP9123183U 1983-06-16 1983-06-16 Substrate heating device Pending JPS60364U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9123183U JPS60364U (en) 1983-06-16 1983-06-16 Substrate heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9123183U JPS60364U (en) 1983-06-16 1983-06-16 Substrate heating device

Publications (1)

Publication Number Publication Date
JPS60364U true JPS60364U (en) 1985-01-05

Family

ID=30221216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9123183U Pending JPS60364U (en) 1983-06-16 1983-06-16 Substrate heating device

Country Status (1)

Country Link
JP (1) JPS60364U (en)

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