JPS63202097U - - Google Patents

Info

Publication number
JPS63202097U
JPS63202097U JP9248787U JP9248787U JPS63202097U JP S63202097 U JPS63202097 U JP S63202097U JP 9248787 U JP9248787 U JP 9248787U JP 9248787 U JP9248787 U JP 9248787U JP S63202097 U JPS63202097 U JP S63202097U
Authority
JP
Japan
Prior art keywords
heater coil
heater
insulating material
covered
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9248787U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9248787U priority Critical patent/JPS63202097U/ja
Publication of JPS63202097U publication Critical patent/JPS63202097U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案装置の一実施例を適用したカー
トリツジヒータの断面図、第２図は第１図の部
の詳細説明図、第３図は従来装置の一例を適用し
たカートリツジヒータの断面図、第４図はカート
リツジヒータを横型半導体製造装置に用いた場合
の簡略断面図、第５図は従来例によるヒータコイ
ル上部がセンター方向に変形した状態を示す説明
図である。 １……ヒータコイル、２……断熱材、３……ヒ
ータケース、４……従来型組合せピース。 Fig. 1 is a sectional view of a cartridge heater to which an embodiment of the device of the present invention is applied, Fig. 2 is a detailed explanatory view of the part shown in Fig. 1, and Fig. 3 is a sectional view of a cartridge heater to which an example of the conventional device is applied. FIG. 4 is a simplified cross-sectional view of a cartridge heater used in a horizontal semiconductor manufacturing apparatus, and FIG. 5 is an explanatory diagram showing a conventional example in which the upper part of the heater coil is deformed toward the center. 1...Heater coil, 2...Insulating material, 3...Heater case, 4...Conventional combination piece.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 横型半導体製造装置に使用されるカートリツジ
ヒータのヒータコイル１の外周を断熱材２で被い
、この断熱材２にヒータコイル１を従来型組合せ
ピース４で取付けると共に、断熱材２の外周をヒ
ータケース３で被つた構造の装置において、ヒー
タコイル１上部中央に並んだ多数個の従来型組合
せピース４を配列せしめてなる横型半導体製造装
置用カートリツジヒータのヒータコイル取付け装
置。 The outer periphery of the heater coil 1 of a cartridge heater used in horizontal semiconductor manufacturing equipment is covered with a heat insulating material 2, and the heater coil 1 is attached to the heat insulating material 2 using a conventional combination piece 4, and the outer periphery of the heat insulating material 2 is covered with a heater coil 2. A heater coil mounting device for a cartridge heater for a horizontal semiconductor manufacturing device, in which a large number of conventional combination pieces 4 are arranged in the upper center of a heater coil 1 in the device covered by a case 3.
JP9248787U 1987-06-15 1987-06-15 Pending JPS63202097U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9248787U JPS63202097U (en) 1987-06-15 1987-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9248787U JPS63202097U (en) 1987-06-15 1987-06-15

Publications (1)

Publication Number Publication Date
JPS63202097U true JPS63202097U (en) 1988-12-27

Family

ID=30954240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9248787U Pending JPS63202097U (en) 1987-06-15 1987-06-15

Country Status (1)

Country Link
JP (1) JPS63202097U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007502549A (en) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ Holding mechanism of heating coil of high temperature diffusion furnace

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615514U (en) * 1979-07-17 1981-02-10
JPS5623675U (en) * 1979-07-30 1981-03-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615514U (en) * 1979-07-17 1981-02-10
JPS5623675U (en) * 1979-07-30 1981-03-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007502549A (en) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ Holding mechanism of heating coil of high temperature diffusion furnace

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