JPS62203272U - - Google Patents
Info
- Publication number
- JPS62203272U JPS62203272U JP8938286U JP8938286U JPS62203272U JP S62203272 U JPS62203272 U JP S62203272U JP 8938286 U JP8938286 U JP 8938286U JP 8938286 U JP8938286 U JP 8938286U JP S62203272 U JPS62203272 U JP S62203272U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- susceptor
- wafer
- epitaxial growth
- gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005484 gravity Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 239000012495 reaction gas Substances 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案一実施例の一部省略した構成説
明図、第２図は反応炉内温度分布図、第３図は反
応炉内の反応ガスの流れの説明図、第４図は従来
のエピタキシヤル成長炉装置の構成説明図、第５
図は従来装置における反応ガスの流れの説明図で
ある。
１１はサセプター、１３は流路、１４はウエハ
。
Fig. 1 is an explanatory diagram of a partially omitted configuration of an embodiment of the present invention, Fig. 2 is a temperature distribution diagram in the reactor, Fig. 3 is an explanatory diagram of the flow of reaction gas in the reactor, and Fig. 4 is a conventional diagram. Explanatory diagram of the structure of the epitaxial growth furnace apparatus, No. 5
The figure is an explanatory diagram of the flow of reaction gas in a conventional device. 11 is a susceptor, 13 is a flow path, and 14 is a wafer.
Claims (1)
ると共にこのサセプター１１の中央部に上方に抜
ける流路１３を設け、サセプター１１の下面にウ
エハ１４を取付け、反応ガスＡをサセプター１１
の外周側からウエハ１４の表面を経て流路１３に
導くようにしたことを特徴とするエピタキシヤル
成長炉装置。 The susceptor 11 is made perpendicular to the direction of gravity, and a flow path 13 is provided in the center of the susceptor 11 to exit upward.
An epitaxial growth furnace apparatus characterized in that the flow path is guided from the outer peripheral side of the wafer 14 through the surface of the wafer 14 to the flow path 13.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8938286U JPS62203272U (en) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8938286U JPS62203272U (en) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203272U true JPS62203272U (en) | 1987-12-25 |
Family
ID=30948324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8938286U Pending JPS62203272U (en) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203272U (en) |
-
1986
- 1986-06-13 JP JP8938286U patent/JPS62203272U/ja active Pending
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