JPS6311575U - - Google Patents
Info
- Publication number
- JPS6311575U JPS6311575U JP10304286U JP10304286U JPS6311575U JP S6311575 U JPS6311575 U JP S6311575U JP 10304286 U JP10304286 U JP 10304286U JP 10304286 U JP10304286 U JP 10304286U JP S6311575 U JPS6311575 U JP S6311575U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- base
- susceptor
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す縦型気相成長
装置の概要断面図、第２図および第３図は従来の
縦型気相成長装置のそれぞれ異なる例を示す概要
断面図である。
１……基台、４……気密室、５……サセプタ、
６……回転軸、７……基板、８……ノズル、９…
…ＲＦコイル、１１……排気管、３２……金属ベ
ルジヤ、２０……石英ベルジヤ、２５……空間、
３３……冷却水導入口、３４……冷却水排出口。
FIG. 1 is a schematic sectional view of a vertical vapor phase growth apparatus showing an embodiment of the present invention, and FIGS. 2 and 3 are schematic sectional views showing different examples of conventional vertical vapor growth apparatuses. . 1... Base, 4... Airtight chamber, 5... Susceptor,
6... Rotating shaft, 7... Substrate, 8... Nozzle, 9...
...RF coil, 11...exhaust pipe, 32...metal bell gear, 20...quartz bell gear, 25...space,
33...Cooling water inlet, 34...Cooling water outlet.
Claims (1)
置した複数の基板の表面に半導体物質のエピタキ
シヤル薄膜を気相成長させる気密室を前記サセプ
タの周囲に前記基台と石英ベルジヤ等とによつて
構成すると共に前記石英ベルジヤの外側に金属ベ
ルジヤを被せてなる気相成長装置において、前記
石英ベルジヤと前記金属ベルジヤの間の空間に冷
却水を流すための冷却水給排手段を備えた気相成
長装置。 An airtight chamber is provided around the susceptor between the base and a quartz bell gear, etc., in which epitaxial thin films of semiconductor materials are grown in a vapor phase on the surfaces of a plurality of substrates placed on a susceptor horizontally provided on the base. In this vapor phase growth apparatus, the quartz bell gear is covered with a metal bell gear on the outside. Phase growth device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304286U JPS6311575U (en) | 1986-07-04 | 1986-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304286U JPS6311575U (en) | 1986-07-04 | 1986-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311575U true JPS6311575U (en) | 1988-01-26 |
Family
ID=30975233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10304286U Pending JPS6311575U (en) | 1986-07-04 | 1986-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311575U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8215119B2 (en) | 2007-11-01 | 2012-07-10 | Mitsubishi Electric Corporation | Refrigerant filling apparatus of refrigerating and air conditioning apparatus and refrigerant filling method of refrigerating and air conditioning apparatus |
-
1986
- 1986-07-04 JP JP10304286U patent/JPS6311575U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8215119B2 (en) | 2007-11-01 | 2012-07-10 | Mitsubishi Electric Corporation | Refrigerant filling apparatus of refrigerating and air conditioning apparatus and refrigerant filling method of refrigerating and air conditioning apparatus |
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