JPS61177440U - - Google Patents
Info
- Publication number
- JPS61177440U JPS61177440U JP6163185U JP6163185U JPS61177440U JP S61177440 U JPS61177440 U JP S61177440U JP 6163185 U JP6163185 U JP 6163185U JP 6163185 U JP6163185 U JP 6163185U JP S61177440 U JPS61177440 U JP S61177440U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- bell
- gear
- reaction gas
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例による気相成長装置
の縦断面図、第２図は従来の気相成長装置の断面
図である。
１……角型ステンレス鋼製ベルジヤー、２……
石英ベルジヤー、３，１３……サセプター、４…
…赤外線加熱ランプ室、５，１５……半導体ウエ
ハ、６，１６……反応ガス供給管、７，１７……
排気管、８，１８……赤外線加熱ランプ（ランプ
）、９……赤外線加熱ランプ室振動用駆動部、１
０……石英反応管。
FIG. 1 is a longitudinal sectional view of a vapor phase growth apparatus according to an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional vapor phase growth apparatus. 1... Square stainless steel bell gear, 2...
Quartz bell gear, 3, 13... Susceptor, 4...
...Infrared heating lamp chamber, 5,15...Semiconductor wafer, 6,16...Reaction gas supply pipe, 7,17...
Exhaust pipe, 8, 18... Infrared heating lamp (lamp), 9... Infrared heating lamp chamber vibration drive unit, 1
0...Quartz reaction tube.
Claims (1)
部に取り付けられた第２のベルジヤーと、該第２
のベルジヤー内に設けられた回転可能な円板形の
サセプタと、前記サセプタ上で前記第１のベルジ
ヤーと前記第２のベルジヤーとの間に設けられた
赤外線加熱ランプと、前記第２のベルジヤー内に
反応ガスを供給および排気する反応ガス供給管と
反応ガス排気管とを含むことを特徴とする気相成
長装置。 a first bell gear, a second bell gear attached inside the first bell gear, and a second bell gear;
a rotatable disc-shaped susceptor provided within the bell gear; an infrared heat lamp provided on the susceptor between the first bell gear and the second bell gear; and an infrared heating lamp provided within the second bell gear. A vapor phase growth apparatus comprising a reaction gas supply pipe and a reaction gas exhaust pipe for supplying and exhausting a reaction gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6163185U JPS61177440U (en) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6163185U JPS61177440U (en) | 1985-04-24 | 1985-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61177440U true JPS61177440U (en) | 1986-11-05 |
Family
ID=30590081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6163185U Pending JPS61177440U (en) | 1985-04-24 | 1985-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61177440U (en) |
-
1985
- 1985-04-24 JP JP6163185U patent/JPS61177440U/ja active Pending
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