JPS6251170U - - Google Patents
Info
- Publication number
- JPS6251170U JPS6251170U JP14338685U JP14338685U JPS6251170U JP S6251170 U JPS6251170 U JP S6251170U JP 14338685 U JP14338685 U JP 14338685U JP 14338685 U JP14338685 U JP 14338685U JP S6251170 U JPS6251170 U JP S6251170U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- planetarium
- annular holder
- revolves
- attaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
Description
第１図は本考案の一実施例の真空蒸着装置にお
けるプラネタリウムの要部拡大断面図、第２図は
環状保持具の一例を示す斜視図、第３図は真空蒸
着装置の概略断面図、第４図は従来のプラネタリ
ウムの要部拡大断面図である。
１……真空チヤンバー、８……開口部、９……
プラネタリウム、１０……被処理物、２０……環
状保持具、２１……支持用フランジ、２２……係
止用フランジ。
FIG. 1 is an enlarged sectional view of the main part of a planetarium in a vacuum evaporation apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view showing an example of an annular holder, and FIG. 3 is a schematic sectional view of the vacuum evaporation apparatus. FIG. 4 is an enlarged sectional view of the main parts of a conventional planetarium. 1... Vacuum chamber, 8... Opening, 9...
planetarium, 10... object to be treated, 20... annular holder, 21... support flange, 22... locking flange.
Claims (1)
タリウムに形成された開口部に被処理物を装着し
て蒸着物質を真空蒸着する装置において、 上記プラネタリウムの開口部に、被処理物を保
持する環状保持具を着脱自在に装着したことを特
徴とする真空蒸着装置。[Scope of Claim for Utility Model Registration] In an apparatus for vacuum evaporating a deposition material by attaching a treatment object to an opening formed in a planetarium that rotates and revolves within a vacuum chamber, A vacuum evaporation device characterized in that an annular holder for holding an object is detachably attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338685U JPS6251170U (en) | 1985-09-19 | 1985-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338685U JPS6251170U (en) | 1985-09-19 | 1985-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251170U true JPS6251170U (en) | 1987-03-30 |
Family
ID=31053022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14338685U Pending JPS6251170U (en) | 1985-09-19 | 1985-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251170U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297035A (en) * | 1988-05-24 | 1990-04-09 | Balzers Ag | Vacuum apparatus |
| JP2006339181A (en) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | Wafer holding jig |
| JP2013032574A (en) * | 2011-08-03 | 2013-02-14 | Nippon Electric Glass Co Ltd | Carousel of sputtering film-deposition apparatus and sputtering film-deposition apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010235A (en) * | 1973-06-01 | 1975-02-01 |
-
1985
- 1985-09-19 JP JP14338685U patent/JPS6251170U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5010235A (en) * | 1973-06-01 | 1975-02-01 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297035A (en) * | 1988-05-24 | 1990-04-09 | Balzers Ag | Vacuum apparatus |
| JP2006339181A (en) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | Wafer holding jig |
| JP4658692B2 (en) * | 2005-05-31 | 2011-03-23 | ルネサスエレクトロニクス株式会社 | Wafer holding jig |
| JP2013032574A (en) * | 2011-08-03 | 2013-02-14 | Nippon Electric Glass Co Ltd | Carousel of sputtering film-deposition apparatus and sputtering film-deposition apparatus |