JPS63157925U - - Google Patents
Info
- Publication number
- JPS63157925U JPS63157925U JP5033387U JP5033387U JPS63157925U JP S63157925 U JPS63157925 U JP S63157925U JP 5033387 U JP5033387 U JP 5033387U JP 5033387 U JP5033387 U JP 5033387U JP S63157925 U JPS63157925 U JP S63157925U
- Authority
- JP
- Japan
- Prior art keywords
- reference circle
- susceptor
- wafer
- radius
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 2
Description
第１図および第２図は本考案の一実施例を示し
第１図は平面図、第２図は第１図の２―２線拡大
断面図、第３図および第４図はそれぞれ異なる形
状をした本考案の他の実施例における平面図、第
５図および第６図は従来例を示し第５図は平面図
、第６図は第５図の６―６線拡大断面図である。
１３……ウエハ、２１，３１，３６……サセプ
タ、２２，２２ａ，２２ｂ……ザグリ、２３……
基準円、２４……ふくらみ。
Figures 1 and 2 show an embodiment of the present invention, Figure 1 is a plan view, Figure 2 is an enlarged sectional view taken along line 2-2 in Figure 1, and Figures 3 and 4 are different shapes. 5 and 6 show a conventional example, FIG. 5 is a plan view, and FIG. 6 is an enlarged sectional view taken along the line 6--6 in FIG. 5. 13... Wafer, 21, 31, 36... Susceptor, 22, 22a, 22b... Counterbore, 23...
Reference circle, 24...bulge.
Claims (1)
置するザグリの外周形状を、前記ウエハ外径より
僅かに大きい円を基準円としこの基準円の半径の
１／２ないし１／１．１の半径をもつて、前記基
準円の外側へ１ないし４mmふくらむ円弧を２ない
し６箇所有するように形成した気相成長装置のサ
セプタ。 In the susceptor of a vapor phase growth apparatus, the outer circumferential shape of the counterbore on which the wafer is placed is set to a circle slightly larger than the outer diameter of the wafer as a reference circle, and the radius is 1/2 to 1/1.1 of the radius of this reference circle. A susceptor for a vapor phase growth apparatus is formed to have two to six arcs extending 1 to 4 mm outward from the reference circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5033387U JPS63157925U (en) | 1987-04-02 | 1987-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5033387U JPS63157925U (en) | 1987-04-02 | 1987-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157925U true JPS63157925U (en) | 1988-10-17 |
Family
ID=30873601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5033387U Pending JPS63157925U (en) | 1987-04-02 | 1987-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157925U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681951A (en) * | 1980-11-10 | 1981-07-04 | Toshiba Corp | Holder of semiconductor substrate |
-
1987
- 1987-04-02 JP JP5033387U patent/JPS63157925U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681951A (en) * | 1980-11-10 | 1981-07-04 | Toshiba Corp | Holder of semiconductor substrate |