JPS63137933U - - Google Patents
Info
- Publication number
- JPS63137933U JPS63137933U JP3163587U JP3163587U JPS63137933U JP S63137933 U JPS63137933 U JP S63137933U JP 3163587 U JP3163587 U JP 3163587U JP 3163587 U JP3163587 U JP 3163587U JP S63137933 U JPS63137933 U JP S63137933U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- storage hole
- semiconductor
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
Description
第１図は本考案の一実施例に係る半導体製造装
置の概略断面図、第２図は同装置に用いられるサ
セプタの一部切欠斜視図、第３図は同サセプタの
拡大半断面図、第４図及び第５図はそれぞれサセ
プタカバーの他の例を示す斜視図、第６図は従来
装置の概略断面図、第７図は同従来装置に用いら
れるアセプタの斜視図である。
１…外側ベルジヤ、１′…内側ベルジヤ、１０
…サセプタ、１１…サセプタ本体、１２，１２′
，１２″…サセプタカバー、１２ｄ…ウエハ収納
穴、Ｗ…半導体ウエハ。
FIG. 1 is a schematic sectional view of a semiconductor manufacturing device according to an embodiment of the present invention, FIG. 2 is a partially cutaway perspective view of a susceptor used in the device, and FIG. 3 is an enlarged half-sectional view of the susceptor. 4 and 5 are perspective views showing other examples of the susceptor cover, FIG. 6 is a schematic sectional view of a conventional device, and FIG. 7 is a perspective view of an ceptor used in the conventional device. 1...Outer bell gear, 1'...Inner bell gear, 10
...Susceptor, 11...Susceptor body, 12, 12'
, 12″...Susceptor cover, 12d...Wafer storage hole, W...Semiconductor wafer.
Claims (1)
、加熱しながら処理ガスを供給して該ウエハにエ
ピタキシヤル成長層を形成する装置において、 上記サセプタを、サセプタ本体と、ウエハ収納
穴を有するサセプタカバーとで構成したことを特
徴とする半導体製造装置。[Claims for Utility Model Registration] An apparatus for forming an epitaxial growth layer on a semiconductor wafer by placing a semiconductor wafer on a susceptor in a bell gear and supplying a processing gas while heating the wafer, comprising: a susceptor body; A semiconductor manufacturing device comprising: a susceptor cover having a wafer storage hole; and a susceptor cover having a wafer storage hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163587U JPS63137933U (en) | 1987-03-03 | 1987-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163587U JPS63137933U (en) | 1987-03-03 | 1987-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137933U true JPS63137933U (en) | 1988-09-12 |
Family
ID=30837553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3163587U Pending JPS63137933U (en) | 1987-03-03 | 1987-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137933U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173560A (en) * | 2004-11-16 | 2006-06-29 | Sumitomo Electric Ind Ltd | Wafer guide, metal organic vapor phase growing device and method for depositing nitride semiconductor |
-
1987
- 1987-03-03 JP JP3163587U patent/JPS63137933U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173560A (en) * | 2004-11-16 | 2006-06-29 | Sumitomo Electric Ind Ltd | Wafer guide, metal organic vapor phase growing device and method for depositing nitride semiconductor |
| KR101127748B1 (en) * | 2004-11-16 | 2012-03-23 | 스미토모덴키고교가부시키가이샤 | Wafer guide, mocvd equipment, and nitride semiconductor growth mehtod |