JPH02108339U - - Google Patents
Info
- Publication number
- JPH02108339U JPH02108339U JP1675289U JP1675289U JPH02108339U JP H02108339 U JPH02108339 U JP H02108339U JP 1675289 U JP1675289 U JP 1675289U JP 1675289 U JP1675289 U JP 1675289U JP H02108339 U JPH02108339 U JP H02108339U
- Authority
- JP
- Japan
- Prior art keywords
- attached
- boss part
- rotating shaft
- ring plate
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、この考案の一実施例に係るウエーハ
デイスクを示す平面図である。第２図は、第１図
の線−に沿う拡大断面図である。第３図は、
従来のウエーハデイスクの一例を示す概略断面図
である。
４……ウエーハ、１２……実施例に係るウエー
ハデイスク、１６……回転軸、１８……ボス部、
２２……リングプレート部。
FIG. 1 is a plan view showing a wafer disk according to an embodiment of this invention. FIG. 2 is an enlarged sectional view taken along line - in FIG. 1. Figure 3 shows
1 is a schematic cross-sectional view showing an example of a conventional wafer disk. 4... Wafer, 12... Wafer disk according to the embodiment, 16... Rotating shaft, 18... Boss portion,
22...Ring plate section.
Claims (1)
、このボス部の周縁部に同心状にかつ着脱可能に
取り付けられていて、表面に複数枚のウエーハを
装着可能なリングプレート部とを備えて成ること
を特徴とするウエーハデイスク。 A boss part having a disk shape and connected to a rotating shaft; a ring plate part which is attached concentrically and removably to the periphery of the boss part, and on which a plurality of wafers can be attached. A wafer disk characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1675289U JPH02108339U (en) | 1989-02-14 | 1989-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1675289U JPH02108339U (en) | 1989-02-14 | 1989-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108339U true JPH02108339U (en) | 1990-08-29 |
Family
ID=31229951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1675289U Pending JPH02108339U (en) | 1989-02-14 | 1989-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108339U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006178471A (en) * | 2004-12-23 | 2006-07-06 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method utilizing multiple substrate carrier for flat panel display substrate |
| JP2011507266A (en) * | 2007-12-12 | 2011-03-03 | ビーコ・インストゥルメンツ・インコーポレイテッド | Wafer carrier with hub |
| KR101300118B1 (en) * | 2010-12-15 | 2013-08-26 | 엘아이지에이디피 주식회사 | Susceptor and chemical vapor deposition apparatus having the same |
-
1989
- 1989-02-14 JP JP1675289U patent/JPH02108339U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006178471A (en) * | 2004-12-23 | 2006-07-06 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method utilizing multiple substrate carrier for flat panel display substrate |
| JP4496165B2 (en) * | 2004-12-23 | 2010-07-07 | エーエスエムエル ネザーランズ ビー．ブイ． | Lithographic apparatus and device manufacturing method using a plurality of substrate carriers for flat panel display substrates |
| JP2011507266A (en) * | 2007-12-12 | 2011-03-03 | ビーコ・インストゥルメンツ・インコーポレイテッド | Wafer carrier with hub |
| KR101300118B1 (en) * | 2010-12-15 | 2013-08-26 | 엘아이지에이디피 주식회사 | Susceptor and chemical vapor deposition apparatus having the same |