JPS63446U - - Google Patents
Info
- Publication number
- JPS63446U JPS63446U JP9371986U JP9371986U JPS63446U JP S63446 U JPS63446 U JP S63446U JP 9371986 U JP9371986 U JP 9371986U JP 9371986 U JP9371986 U JP 9371986U JP S63446 U JPS63446 U JP S63446U
- Authority
- JP
- Japan
- Prior art keywords
- thread
- cathode
- rod
- evaporation source
- type evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000010406 cathode material Substances 0.000 claims 1
- 238000010891 electric arc Methods 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
Description
第１図は、この考案の一実施例に係るアーク式
蒸発源を真空容器に取り付けた状態で示す断面図
である。第２図は、従来のアーク式蒸発源の一例
を真空容器に取り付けた状態で示す断面図である
。
２…真空容器、６…カソード、８…フランジ、
２６…実施例に係るアーク式蒸発源、２８…給電
棒、２９，３３…ねじ山、３０…永久磁石、３２
…リング。
FIG. 1 is a cross-sectional view showing an arc type evaporation source according to an embodiment of the invention attached to a vacuum container. FIG. 2 is a sectional view showing an example of a conventional arc type evaporation source attached to a vacuum container. 2... Vacuum container, 6... Cathode, 8... Flange,
26... Arc type evaporation source according to the example, 28... Power supply rod, 29, 33... Screw thread, 30... Permanent magnet, 32
…ring.
Claims (1)
ド物質を蒸発させるものにおいて、カソードの後
方に設けられていて外面にねじ山を有する棒と、
当該棒に通されたリング状の永久磁石であつてそ
の内面に直接または間接的に上記棒のねじ山と噛
み合うねじ山を有するものとを備えることを特徴
とするアーク式蒸発源。 In a device for vaporizing cathode material using arc discharge at the cathode, a rod provided at the rear of the cathode and having a thread on the outer surface;
An arc type evaporation source characterized by comprising a ring-shaped permanent magnet that is passed through the rod and has a thread on its inner surface that engages directly or indirectly with the thread of the rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9371986U JPS63446U (en) | 1986-06-19 | 1986-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9371986U JPS63446U (en) | 1986-06-19 | 1986-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63446U true JPS63446U (en) | 1988-01-05 |
Family
ID=30956531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9371986U Pending JPS63446U (en) | 1986-06-19 | 1986-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63446U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010525158A (en) * | 2007-04-17 | 2010-07-22 | スルザー メタプラス ゲーエムベーハー | Vacuum arc evaporation source and arc evaporation chamber having a vacuum arc evaporation source |
| WO2010125756A1 (en) * | 2009-04-28 | 2010-11-04 | 株式会社神戸製鋼所 | Arc evaporation source and method for manufacturing film using same |
| WO2011161903A1 (en) * | 2010-06-23 | 2011-12-29 | 株式会社神戸製鋼所 | Arc evaporation source having fast film-forming speed, film formation device and manufacturing method for coating film using the arc evaporation source |
| JP2013100605A (en) * | 2013-01-08 | 2013-05-23 | Fundacion Tekniker | Arc vapor deposition device with strong magnetic guide for target having large surface region |
| JP2015038249A (en) * | 2009-04-28 | 2015-02-26 | 株式会社神戸製鋼所 | Arc evaporation source having high deposition rate and method of producing coating using arc evaporation source |
-
1986
- 1986-06-19 JP JP9371986U patent/JPS63446U/ja active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010525158A (en) * | 2007-04-17 | 2010-07-22 | スルザー メタプラス ゲーエムベーハー | Vacuum arc evaporation source and arc evaporation chamber having a vacuum arc evaporation source |
| EP2720249A3 (en) * | 2007-04-17 | 2014-06-18 | Sulzer Metaplas GmbH | Arc evaporation chamber with a vacuum arc evaporation source |
| WO2010125756A1 (en) * | 2009-04-28 | 2010-11-04 | 株式会社神戸製鋼所 | Arc evaporation source and method for manufacturing film using same |
| JP2010275625A (en) * | 2009-04-28 | 2010-12-09 | Kobe Steel Ltd | Arc-type evaporation source with high film-forming rate, and method for producing coating film using the arc-type evaporation source |
| CN102348828A (en) * | 2009-04-28 | 2012-02-08 | 株式会社神户制钢所 | Arc evaporation source and method for manufacturing film using same |
| JP2015038249A (en) * | 2009-04-28 | 2015-02-26 | 株式会社神戸製鋼所 | Arc evaporation source having high deposition rate and method of producing coating using arc evaporation source |
| TWI507555B (en) * | 2009-04-28 | 2015-11-11 | Kobe Steel Ltd | An arc-type evaporation source, and a method for manufacturing the same |
| WO2011161903A1 (en) * | 2010-06-23 | 2011-12-29 | 株式会社神戸製鋼所 | Arc evaporation source having fast film-forming speed, film formation device and manufacturing method for coating film using the arc evaporation source |
| JP2012026026A (en) * | 2010-06-23 | 2012-02-09 | Kobe Steel Ltd | Arc evaporation source having fast film-forming speed, manufacturing method for coating film using the arc evaporation source and film forming device |
| US9266180B2 (en) | 2010-06-23 | 2016-02-23 | Kobe Steel, Ltd. | Arc evaporation source having fast film-forming speed, coating film manufacturing method and film formation apparatus using the arc evaporation source |
| JP2013100605A (en) * | 2013-01-08 | 2013-05-23 | Fundacion Tekniker | Arc vapor deposition device with strong magnetic guide for target having large surface region |