JPH0418655U - - Google Patents
Info
- Publication number
- JPH0418655U JPH0418655U JP5680190U JP5680190U JPH0418655U JP H0418655 U JPH0418655 U JP H0418655U JP 5680190 U JP5680190 U JP 5680190U JP 5680190 U JP5680190 U JP 5680190U JP H0418655 U JPH0418655 U JP H0418655U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- planetarium
- concave portion
- window
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図及び第２図は本考案の一実施例を示すも
のであつて、第１図は蒸着装置の全体構成を示す
概略図、第２図はプラネタリウムの蒸着窓に取り
付けられた補助リングの縦断面図、第３図乃至第
５図は従来例を示すものであつて、第３図は蒸着
装置の全体構成を示す概略図、第４図はプラネタ
リウムの蒸着窓に取り付けられた補助リングの縦
断面図、第５図は蒸着窓に取り付けられた補助リ
ングの平面図である。
１……チヤンバ、２……蒸着源、３……プラネ
タリウム、３ａ……蒸着窓、３ｂ……開口縁部、
４……ウエハ、５……補助リング、５ｂ……外側
鍔部（鍔部）。
Figures 1 and 2 show one embodiment of the present invention, with Figure 1 being a schematic diagram showing the overall configuration of the vapor deposition apparatus, and Figure 2 showing the auxiliary ring attached to the vapor deposition window of the planetarium. The vertical cross-sectional views and FIGS. 3 to 5 show conventional examples. FIG. 3 is a schematic diagram showing the overall configuration of the vapor deposition apparatus, and FIG. 4 is a diagram showing the auxiliary ring attached to the vapor deposition window of a planetarium. The vertical cross-sectional view, FIG. 5, is a plan view of the auxiliary ring attached to the deposition window. 1... Chamber, 2... Vapor deposition source, 3... Planetarium, 3a... Vapor deposition window, 3b... Opening edge,
4...Wafer, 5...Auxiliary ring, 5b...Outer flange (flange).
Claims (1)
チヤンバ内部に配置され、このプラネタリウムに
多数開口形成された蒸着窓にそれぞれウエハを取
り付けるための補助リングが嵌入されると共に、
この補助リングの鍔部が蒸着窓の開口縁部に溶接
された蒸着装置において、 各蒸着窓の開口縁部がそれぞれ平面状を成した
多面体によつてプラネタリウムの凹部が形成され
たことを特徴とする蒸着装置。[Claims for Utility Model Registration] A planetarium having a concave portion facing the evaporation source is disposed inside the chamber, and auxiliary rings for attaching wafers are fitted into each of the evaporation windows formed in the planetarium with multiple openings, and
In this vapor deposition apparatus in which the flange of the auxiliary ring is welded to the opening edge of the vapor deposition window, the concave portion of the planetarium is formed by a polyhedron in which the opening edges of each vapor deposition window are each planar. Vapor deposition equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5680190U JPH0418655U (en) | 1990-05-29 | 1990-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5680190U JPH0418655U (en) | 1990-05-29 | 1990-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418655U true JPH0418655U (en) | 1992-02-17 |
Family
ID=31580953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5680190U Pending JPH0418655U (en) | 1990-05-29 | 1990-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418655U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006339181A (en) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | Wafer holding jig |
-
1990
- 1990-05-29 JP JP5680190U patent/JPH0418655U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006339181A (en) * | 2005-05-31 | 2006-12-14 | Nec Electronics Corp | Wafer holding jig |
| JP4658692B2 (en) * | 2005-05-31 | 2011-03-23 | ルネサスエレクトロニクス株式会社 | Wafer holding jig |