JPS6334224B2 - - Google Patents

Info

Publication number
JPS6334224B2
JPS6334224B2 JP22313283A JP22313283A JPS6334224B2 JP S6334224 B2 JPS6334224 B2 JP S6334224B2 JP 22313283 A JP22313283 A JP 22313283A JP 22313283 A JP22313283 A JP 22313283A JP S6334224 B2 JPS6334224 B2 JP S6334224B2
Authority
JP
Japan
Prior art keywords
crucible
nozzle
heater
heating
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22313283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60116770A (ja
Inventor
Tozaburo Ichihara
Koyo Tsucha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP22313283A priority Critical patent/JPS60116770A/ja
Publication of JPS60116770A publication Critical patent/JPS60116770A/ja
Publication of JPS6334224B2 publication Critical patent/JPS6334224B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP22313283A 1983-11-29 1983-11-29 クラスタイオンビ−ム蒸発源装置 Granted JPS60116770A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22313283A JPS60116770A (ja) 1983-11-29 1983-11-29 クラスタイオンビ−ム蒸発源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22313283A JPS60116770A (ja) 1983-11-29 1983-11-29 クラスタイオンビ−ム蒸発源装置

Publications (2)

Publication Number Publication Date
JPS60116770A JPS60116770A (ja) 1985-06-24
JPS6334224B2 true JPS6334224B2 (enrdf_load_stackoverflow) 1988-07-08

Family

ID=16793296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22313283A Granted JPS60116770A (ja) 1983-11-29 1983-11-29 クラスタイオンビ−ム蒸発源装置

Country Status (1)

Country Link
JP (1) JPS60116770A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009026340B4 (de) * 2009-08-06 2013-01-31 Solibro Gmbh Effusionszelle

Also Published As

Publication number Publication date
JPS60116770A (ja) 1985-06-24

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