GB1297128A - - Google Patents
Info
- Publication number
- GB1297128A GB1297128A GB1297128DA GB1297128A GB 1297128 A GB1297128 A GB 1297128A GB 1297128D A GB1297128D A GB 1297128DA GB 1297128 A GB1297128 A GB 1297128A
- Authority
- GB
- United Kingdom
- Prior art keywords
- box
- gas
- coil
- binding metal
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000005247 gettering Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000002245 particle Substances 0.000 abstract 2
- 238000009833 condensation Methods 0.000 abstract 1
- 230000005494 condensation Effects 0.000 abstract 1
- 239000002826 coolant Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 210000002445 nipple Anatomy 0.000 abstract 1
- 230000035515 penetration Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6818076A NL6818076A (enrdf_load_stackoverflow) | 1968-12-17 | 1968-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1297128A true GB1297128A (enrdf_load_stackoverflow) | 1972-11-22 |
Family
ID=19805419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1297128D Expired GB1297128A (enrdf_load_stackoverflow) | 1968-12-17 | 1969-12-12 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1959963A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2026366A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1297128A (enrdf_load_stackoverflow) |
| NL (1) | NL6818076A (enrdf_load_stackoverflow) |
-
1968
- 1968-12-17 NL NL6818076A patent/NL6818076A/xx not_active Application Discontinuation
-
1969
- 1969-11-28 DE DE19691959963 patent/DE1959963A1/de not_active Withdrawn
- 1969-12-12 GB GB1297128D patent/GB1297128A/en not_active Expired
- 1969-12-17 FR FR6943740A patent/FR2026366A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE1959963A1 (de) | 1970-07-09 |
| NL6818076A (enrdf_load_stackoverflow) | 1970-06-19 |
| FR2026366A1 (enrdf_load_stackoverflow) | 1970-09-18 |
| DE1959963B2 (enrdf_load_stackoverflow) | 1979-03-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |