DE1959963B2 - - Google Patents
Info
- Publication number
- DE1959963B2 DE1959963B2 DE19691959963 DE1959963A DE1959963B2 DE 1959963 B2 DE1959963 B2 DE 1959963B2 DE 19691959963 DE19691959963 DE 19691959963 DE 1959963 A DE1959963 A DE 1959963A DE 1959963 B2 DE1959963 B2 DE 1959963B2
- Authority
- DE
- Germany
- Prior art keywords
- box
- annular
- electron
- gas
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims description 13
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000003463 adsorbent Substances 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 239000011888 foil Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 11
- 239000002245 particle Substances 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010073306 Exposure to radiation Diseases 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- HHIQWSQEUZDONT-UHFFFAOYSA-N tungsten Chemical compound [W].[W].[W] HHIQWSQEUZDONT-UHFFFAOYSA-N 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6818076A NL6818076A (enrdf_load_stackoverflow) | 1968-12-17 | 1968-12-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1959963A1 DE1959963A1 (de) | 1970-07-09 |
| DE1959963B2 true DE1959963B2 (enrdf_load_stackoverflow) | 1979-03-15 |
Family
ID=19805419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691959963 Withdrawn DE1959963A1 (de) | 1968-12-17 | 1969-11-28 | Elektronenmikroskop |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1959963A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2026366A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1297128A (enrdf_load_stackoverflow) |
| NL (1) | NL6818076A (enrdf_load_stackoverflow) |
-
1968
- 1968-12-17 NL NL6818076A patent/NL6818076A/xx not_active Application Discontinuation
-
1969
- 1969-11-28 DE DE19691959963 patent/DE1959963A1/de not_active Withdrawn
- 1969-12-12 GB GB1297128D patent/GB1297128A/en not_active Expired
- 1969-12-17 FR FR6943740A patent/FR2026366A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE1959963A1 (de) | 1970-07-09 |
| NL6818076A (enrdf_load_stackoverflow) | 1970-06-19 |
| FR2026366A1 (enrdf_load_stackoverflow) | 1970-09-18 |
| GB1297128A (enrdf_load_stackoverflow) | 1972-11-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BHJ | Nonpayment of the annual fee |