NL6818076A - - Google Patents

Info

Publication number
NL6818076A
NL6818076A NL6818076A NL6818076A NL6818076A NL 6818076 A NL6818076 A NL 6818076A NL 6818076 A NL6818076 A NL 6818076A NL 6818076 A NL6818076 A NL 6818076A NL 6818076 A NL6818076 A NL 6818076A
Authority
NL
Netherlands
Application number
NL6818076A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL6818076A priority Critical patent/NL6818076A/xx
Priority to DE19691959963 priority patent/DE1959963A1/de
Priority to GB1297128D priority patent/GB1297128A/en
Priority to FR6943740A priority patent/FR2026366A1/fr
Publication of NL6818076A publication Critical patent/NL6818076A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
NL6818076A 1968-12-17 1968-12-17 NL6818076A (enrdf_load_stackoverflow)

Priority Applications (4)

Application Number Priority Date Filing Date Title
NL6818076A NL6818076A (enrdf_load_stackoverflow) 1968-12-17 1968-12-17
DE19691959963 DE1959963A1 (de) 1968-12-17 1969-11-28 Elektronenmikroskop
GB1297128D GB1297128A (enrdf_load_stackoverflow) 1968-12-17 1969-12-12
FR6943740A FR2026366A1 (enrdf_load_stackoverflow) 1968-12-17 1969-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6818076A NL6818076A (enrdf_load_stackoverflow) 1968-12-17 1968-12-17

Publications (1)

Publication Number Publication Date
NL6818076A true NL6818076A (enrdf_load_stackoverflow) 1970-06-19

Family

ID=19805419

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6818076A NL6818076A (enrdf_load_stackoverflow) 1968-12-17 1968-12-17

Country Status (4)

Country Link
DE (1) DE1959963A1 (enrdf_load_stackoverflow)
FR (1) FR2026366A1 (enrdf_load_stackoverflow)
GB (1) GB1297128A (enrdf_load_stackoverflow)
NL (1) NL6818076A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
DE1959963A1 (de) 1970-07-09
FR2026366A1 (enrdf_load_stackoverflow) 1970-09-18
GB1297128A (enrdf_load_stackoverflow) 1972-11-22
DE1959963B2 (enrdf_load_stackoverflow) 1979-03-15

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Legal Events

Date Code Title Description
BI The patent application has been withdrawn