JPS63149057U - - Google Patents

Info

Publication number
JPS63149057U
JPS63149057U JP4056487U JP4056487U JPS63149057U JP S63149057 U JPS63149057 U JP S63149057U JP 4056487 U JP4056487 U JP 4056487U JP 4056487 U JP4056487 U JP 4056487U JP S63149057 U JPS63149057 U JP S63149057U
Authority
JP
Japan
Prior art keywords
anode
electron beam
holder
anode holder
exhaust hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4056487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546202Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4056487U priority Critical patent/JPH0546202Y2/ja
Publication of JPS63149057U publication Critical patent/JPS63149057U/ja
Application granted granted Critical
Publication of JPH0546202Y2 publication Critical patent/JPH0546202Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP4056487U 1987-03-19 1987-03-19 Expired - Lifetime JPH0546202Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4056487U JPH0546202Y2 (enrdf_load_stackoverflow) 1987-03-19 1987-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4056487U JPH0546202Y2 (enrdf_load_stackoverflow) 1987-03-19 1987-03-19

Publications (2)

Publication Number Publication Date
JPS63149057U true JPS63149057U (enrdf_load_stackoverflow) 1988-09-30
JPH0546202Y2 JPH0546202Y2 (enrdf_load_stackoverflow) 1993-12-02

Family

ID=30854762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4056487U Expired - Lifetime JPH0546202Y2 (enrdf_load_stackoverflow) 1987-03-19 1987-03-19

Country Status (1)

Country Link
JP (1) JPH0546202Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002358920A (ja) * 2001-06-01 2002-12-13 Ulvac Japan Ltd 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002358920A (ja) * 2001-06-01 2002-12-13 Ulvac Japan Ltd 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0546202Y2 (enrdf_load_stackoverflow) 1993-12-02

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