JPS63111747U - - Google Patents

Info

Publication number
JPS63111747U
JPS63111747U JP333287U JP333287U JPS63111747U JP S63111747 U JPS63111747 U JP S63111747U JP 333287 U JP333287 U JP 333287U JP 333287 U JP333287 U JP 333287U JP S63111747 U JPS63111747 U JP S63111747U
Authority
JP
Japan
Prior art keywords
sample
sample holder
bellows
lens barrel
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP333287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0610611Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987003332U priority Critical patent/JPH0610611Y2/ja
Publication of JPS63111747U publication Critical patent/JPS63111747U/ja
Application granted granted Critical
Publication of JPH0610611Y2 publication Critical patent/JPH0610611Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987003332U 1987-01-13 1987-01-13 電子顕微鏡等の試料装置 Expired - Lifetime JPH0610611Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987003332U JPH0610611Y2 (ja) 1987-01-13 1987-01-13 電子顕微鏡等の試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987003332U JPH0610611Y2 (ja) 1987-01-13 1987-01-13 電子顕微鏡等の試料装置

Publications (2)

Publication Number Publication Date
JPS63111747U true JPS63111747U (enrdf_load_stackoverflow) 1988-07-18
JPH0610611Y2 JPH0610611Y2 (ja) 1994-03-16

Family

ID=30782996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987003332U Expired - Lifetime JPH0610611Y2 (ja) 1987-01-13 1987-01-13 電子顕微鏡等の試料装置

Country Status (1)

Country Link
JP (1) JPH0610611Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009033005A (ja) * 2007-07-30 2009-02-12 Ricoh Co Ltd シール機構、ステージ装置、及び電子線描画装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959567A (enrdf_load_stackoverflow) * 1972-10-06 1974-06-10
JPS5962662U (ja) * 1982-10-20 1984-04-24 日本電子株式会社 電子線装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959567A (enrdf_load_stackoverflow) * 1972-10-06 1974-06-10
JPS5962662U (ja) * 1982-10-20 1984-04-24 日本電子株式会社 電子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009033005A (ja) * 2007-07-30 2009-02-12 Ricoh Co Ltd シール機構、ステージ装置、及び電子線描画装置

Also Published As

Publication number Publication date
JPH0610611Y2 (ja) 1994-03-16

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