JPH0142919B2 - - Google Patents

Info

Publication number
JPH0142919B2
JPH0142919B2 JP59117845A JP11784584A JPH0142919B2 JP H0142919 B2 JPH0142919 B2 JP H0142919B2 JP 59117845 A JP59117845 A JP 59117845A JP 11784584 A JP11784584 A JP 11784584A JP H0142919 B2 JPH0142919 B2 JP H0142919B2
Authority
JP
Japan
Prior art keywords
group
inner container
pressure
heater
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59117845A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60264390A (ja
Inventor
Koji Tada
Masami Tatsumi
Toshihiro Kotani
Shinichi Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP59117845A priority Critical patent/JPS60264390A/ja
Priority to DE8585303251T priority patent/DE3567487D1/de
Priority to EP85303251A priority patent/EP0174060B1/en
Priority to US06/733,361 priority patent/US4678534A/en
Publication of JPS60264390A publication Critical patent/JPS60264390A/ja
Publication of JPH0142919B2 publication Critical patent/JPH0142919B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B27/00—Single-crystal growth under a protective fluid
    • C30B27/02—Single-crystal growth under a protective fluid by pulling from a melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/906—Special atmosphere other than vacuum or inert
    • Y10S117/907—Refluxing atmosphere
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/106—Seed pulling including sealing means details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP59117845A 1984-06-08 1984-06-08 単結晶の育成方法 Granted JPS60264390A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP59117845A JPS60264390A (ja) 1984-06-08 1984-06-08 単結晶の育成方法
DE8585303251T DE3567487D1 (en) 1984-06-08 1985-05-08 Method for growing a single crystal
EP85303251A EP0174060B1 (en) 1984-06-08 1985-05-08 Method for growing a single crystal
US06/733,361 US4678534A (en) 1984-06-08 1985-05-13 Method for growing a single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59117845A JPS60264390A (ja) 1984-06-08 1984-06-08 単結晶の育成方法

Publications (2)

Publication Number Publication Date
JPS60264390A JPS60264390A (ja) 1985-12-27
JPH0142919B2 true JPH0142919B2 (enrdf_load_stackoverflow) 1989-09-18

Family

ID=14721692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59117845A Granted JPS60264390A (ja) 1984-06-08 1984-06-08 単結晶の育成方法

Country Status (4)

Country Link
US (1) US4678534A (enrdf_load_stackoverflow)
EP (1) EP0174060B1 (enrdf_load_stackoverflow)
JP (1) JPS60264390A (enrdf_load_stackoverflow)
DE (1) DE3567487D1 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699234B2 (ja) * 1987-05-15 1994-12-07 日本電気株式会社 化合物半導体単結晶成長装置
JPH01239089A (ja) * 1987-11-30 1989-09-25 Toshiba Corp 化合物半導体単結晶の製造方法及び製造装置
US5154795A (en) * 1989-06-12 1992-10-13 Mitsubishi Kasei Polytec Company System for setting analysis condition for a thermal analysis of a fluid inside an apparatus
EP0476389A3 (en) * 1990-08-30 1993-06-09 The Furukawa Electric Co., Ltd. Method of growing single crystal of compound semiconductors
JP3201305B2 (ja) 1996-04-26 2001-08-20 住友電気工業株式会社 Ｉｉｉ−ｖ族化合物半導体結晶の製造方法
JP3596337B2 (ja) 1998-03-25 2004-12-02 住友電気工業株式会社 化合物半導体結晶の製造方法
DE102009027436B4 (de) 2009-07-02 2014-07-17 Calisolar Gmbh Verfahren zur Züchtung von Kristallen aus elektrisch leitenden Schmelzen, die in der Diamant- oder Zinkblendestruktur kristallisieren

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3260573A (en) * 1963-06-26 1966-07-12 Siemens Ag Zone melting gallium in a recycling arsenic atmosphere
FR1568042A (enrdf_load_stackoverflow) * 1968-01-18 1969-05-23
US3929557A (en) * 1973-06-11 1975-12-30 Us Air Force Periodically and alternately accelerating and decelerating rotation rate of a feed crystal
JPS54123585A (en) * 1978-03-20 1979-09-25 Mitsubishi Metal Corp Method and apparatus for growing high dissociation pressure compound single crystal for semiconductor by pulling double-sealed melt
JPS57170891A (en) * 1981-04-15 1982-10-21 Toshiba Corp Manufacture of single crystal
JPS6041037B2 (ja) * 1981-12-04 1985-09-13 三菱マテリアル株式会社 半導体用高解離圧化合物単結晶の製造装置
JPS58135626A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> 化合物半導体単結晶の製造方法及び製造装置
JPS58145691A (ja) * 1982-02-22 1983-08-30 Toshiba Corp 単結晶の製造方法
JPS5945995A (ja) * 1982-09-03 1984-03-15 Sumitomo Electric Ind Ltd 化合物半導体単結晶の引上方法およびその装置
JPS59131600A (ja) * 1983-01-18 1984-07-28 Toshiba Corp 高分解圧化合物半導体単結晶の製造方法
EP0138292B1 (en) * 1983-08-06 1987-10-14 Sumitomo Electric Industries Limited Apparatus for the growth of single crystals
DE139157T1 (de) * 1983-08-31 1985-11-07 Research Development Corp. Of Japan, Tokio/Tokyo Vorrichtung zur zuechtung von einkristallinen zersetzbaren verbindungen.
JPS60112695A (ja) * 1983-11-22 1985-06-19 Sumitomo Electric Ind Ltd 化合物単結晶の引上方法
JPS60138292A (ja) * 1983-12-27 1985-07-22 Matsushita Electric Ind Co Ltd 圧縮機の防振装置

Also Published As

Publication number Publication date
US4678534A (en) 1987-07-07
JPS60264390A (ja) 1985-12-27
DE3567487D1 (en) 1989-02-16
EP0174060A1 (en) 1986-03-12
EP0174060B1 (en) 1989-01-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term