JPH0140300B2 - - Google Patents

Info

Publication number
JPH0140300B2
JPH0140300B2 JP58123043A JP12304383A JPH0140300B2 JP H0140300 B2 JPH0140300 B2 JP H0140300B2 JP 58123043 A JP58123043 A JP 58123043A JP 12304383 A JP12304383 A JP 12304383A JP H0140300 B2 JPH0140300 B2 JP H0140300B2
Authority
JP
Japan
Prior art keywords
laminar flow
flow element
capillary
holes
large number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58123043A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6014121A (ja
Inventor
Kyoharu Tsujimura
Masayuki Kamo
Hirofumi Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ESUTETSUKU KK
Original Assignee
ESUTETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ESUTETSUKU KK filed Critical ESUTETSUKU KK
Priority to JP12304383A priority Critical patent/JPS6014121A/ja
Publication of JPS6014121A publication Critical patent/JPS6014121A/ja
Publication of JPH0140300B2 publication Critical patent/JPH0140300B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/48Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP12304383A 1983-07-05 1983-07-05 層流素子 Granted JPS6014121A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12304383A JPS6014121A (ja) 1983-07-05 1983-07-05 層流素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12304383A JPS6014121A (ja) 1983-07-05 1983-07-05 層流素子

Publications (2)

Publication Number Publication Date
JPS6014121A JPS6014121A (ja) 1985-01-24
JPH0140300B2 true JPH0140300B2 (enrdf_load_stackoverflow) 1989-08-28

Family

ID=14850791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12304383A Granted JPS6014121A (ja) 1983-07-05 1983-07-05 層流素子

Country Status (1)

Country Link
JP (1) JPS6014121A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01272921A (ja) * 1988-04-25 1989-10-31 Cosmo Keiki:Kk 流量変換装置
JPH01299416A (ja) * 1988-05-26 1989-12-04 Cosmo Keiki:Kk 流量変換装置
JP4684387B2 (ja) * 2000-05-26 2011-05-18 株式会社堀場エステック 流量検出機構及び流量検出機構に用いられる抵抗物の製造方法
US6843139B2 (en) * 2003-03-12 2005-01-18 Rosemount Inc. Flow instrument with multisensors
CN102354228B (zh) * 2004-02-27 2014-07-30 霍里巴斯特克公司 流量限制器
TWI292473B (en) * 2005-08-26 2008-01-11 Smc Kk Flow meter
JP5068194B2 (ja) * 2008-02-20 2012-11-07 アズビル株式会社 流量計

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2929248A (en) * 1957-11-13 1960-03-22 Bailey Meter Co Flow meter
JPS5336792B2 (enrdf_load_stackoverflow) * 1973-03-16 1978-10-04
JPS5336792A (en) * 1976-09-17 1978-04-05 Toyota Motor Corp Machine tool
JPS53144371A (en) * 1977-05-21 1978-12-15 Tokyo Seimitsu Co Ltd Flow meter

Also Published As

Publication number Publication date
JPS6014121A (ja) 1985-01-24

Similar Documents

Publication Publication Date Title
DE2849738C2 (de) Halbleiterwandler
JP4484251B2 (ja) 基板、基板の製造方法、ピン治具、調整方法
JPH0599347A (ja) 金属性装着取付面へのシリコン板装着取付方法
JPH1079586A (ja) 放熱装置の受熱部構造
US3390447A (en) Method of making laminar mesh
JPS585951A (ja) 複数の平面構成物の形成法と装置
JPH0140300B2 (enrdf_load_stackoverflow)
JP2000517052A (ja) 圧力センサの製法
JPH11230845A (ja) 半導体圧力検出装置
CA2143641A1 (en) Process for producing miniature components
JPS6213689Y2 (enrdf_load_stackoverflow)
JP3187103B2 (ja) 締結方法及び締結構造
JPH04350529A (ja) 圧力センサ用ダイアフラム
JPS5941131B2 (ja) 熱流センサの製造方法
JPS63135831A (ja) 薄膜ロ−ドセルの製造方法
JP3672170B2 (ja) ガスレートセンサにおけるワイヤセンサ付電極の形成方法及びワイヤセンサ構造
CN119216929A (zh) 用于制备半导体器件的固定工装
JP3258146B2 (ja) 半導体装置
JPH03209838A (ja) 半導体装置
JPH0119402Y2 (enrdf_load_stackoverflow)
JPH06223905A (ja) マイクロピンパッケージ
JPS58193095A (ja) 放熱器の製造方法
JPS6343564A (ja) リニアステッピングモータの製造方法
JPH04287949A (ja) 半導体装置の製造方法
JPS6240443Y2 (enrdf_load_stackoverflow)