JPH0140300B2 - - Google Patents
Info
- Publication number
- JPH0140300B2 JPH0140300B2 JP58123043A JP12304383A JPH0140300B2 JP H0140300 B2 JPH0140300 B2 JP H0140300B2 JP 58123043 A JP58123043 A JP 58123043A JP 12304383 A JP12304383 A JP 12304383A JP H0140300 B2 JPH0140300 B2 JP H0140300B2
- Authority
- JP
- Japan
- Prior art keywords
- laminar flow
- flow element
- capillary
- holes
- large number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12304383A JPS6014121A (ja) | 1983-07-05 | 1983-07-05 | 層流素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12304383A JPS6014121A (ja) | 1983-07-05 | 1983-07-05 | 層流素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6014121A JPS6014121A (ja) | 1985-01-24 |
JPH0140300B2 true JPH0140300B2 (enrdf_load_stackoverflow) | 1989-08-28 |
Family
ID=14850791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12304383A Granted JPS6014121A (ja) | 1983-07-05 | 1983-07-05 | 層流素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6014121A (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01272921A (ja) * | 1988-04-25 | 1989-10-31 | Cosmo Keiki:Kk | 流量変換装置 |
JPH01299416A (ja) * | 1988-05-26 | 1989-12-04 | Cosmo Keiki:Kk | 流量変換装置 |
JP4684387B2 (ja) * | 2000-05-26 | 2011-05-18 | 株式会社堀場エステック | 流量検出機構及び流量検出機構に用いられる抵抗物の製造方法 |
US6843139B2 (en) * | 2003-03-12 | 2005-01-18 | Rosemount Inc. | Flow instrument with multisensors |
CN102354228B (zh) * | 2004-02-27 | 2014-07-30 | 霍里巴斯特克公司 | 流量限制器 |
TWI292473B (en) * | 2005-08-26 | 2008-01-11 | Smc Kk | Flow meter |
JP5068194B2 (ja) * | 2008-02-20 | 2012-11-07 | アズビル株式会社 | 流量計 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2929248A (en) * | 1957-11-13 | 1960-03-22 | Bailey Meter Co | Flow meter |
JPS5336792B2 (enrdf_load_stackoverflow) * | 1973-03-16 | 1978-10-04 | ||
JPS5336792A (en) * | 1976-09-17 | 1978-04-05 | Toyota Motor Corp | Machine tool |
JPS53144371A (en) * | 1977-05-21 | 1978-12-15 | Tokyo Seimitsu Co Ltd | Flow meter |
-
1983
- 1983-07-05 JP JP12304383A patent/JPS6014121A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6014121A (ja) | 1985-01-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE2849738C2 (de) | Halbleiterwandler | |
JP4484251B2 (ja) | 基板、基板の製造方法、ピン治具、調整方法 | |
JPH0599347A (ja) | 金属性装着取付面へのシリコン板装着取付方法 | |
JPH1079586A (ja) | 放熱装置の受熱部構造 | |
US3390447A (en) | Method of making laminar mesh | |
JPS585951A (ja) | 複数の平面構成物の形成法と装置 | |
JPH0140300B2 (enrdf_load_stackoverflow) | ||
JP2000517052A (ja) | 圧力センサの製法 | |
JPH11230845A (ja) | 半導体圧力検出装置 | |
CA2143641A1 (en) | Process for producing miniature components | |
JPS6213689Y2 (enrdf_load_stackoverflow) | ||
JP3187103B2 (ja) | 締結方法及び締結構造 | |
JPH04350529A (ja) | 圧力センサ用ダイアフラム | |
JPS5941131B2 (ja) | 熱流センサの製造方法 | |
JPS63135831A (ja) | 薄膜ロ−ドセルの製造方法 | |
JP3672170B2 (ja) | ガスレートセンサにおけるワイヤセンサ付電極の形成方法及びワイヤセンサ構造 | |
CN119216929A (zh) | 用于制备半导体器件的固定工装 | |
JP3258146B2 (ja) | 半導体装置 | |
JPH03209838A (ja) | 半導体装置 | |
JPH0119402Y2 (enrdf_load_stackoverflow) | ||
JPH06223905A (ja) | マイクロピンパッケージ | |
JPS58193095A (ja) | 放熱器の製造方法 | |
JPS6343564A (ja) | リニアステッピングモータの製造方法 | |
JPH04287949A (ja) | 半導体装置の製造方法 | |
JPS6240443Y2 (enrdf_load_stackoverflow) |