JPS6014121A - 層流素子 - Google Patents
層流素子Info
- Publication number
- JPS6014121A JPS6014121A JP12304383A JP12304383A JPS6014121A JP S6014121 A JPS6014121 A JP S6014121A JP 12304383 A JP12304383 A JP 12304383A JP 12304383 A JP12304383 A JP 12304383A JP S6014121 A JPS6014121 A JP S6014121A
- Authority
- JP
- Japan
- Prior art keywords
- laminar flow
- flow element
- flow rate
- many holes
- rate characteristic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000470 constituent Substances 0.000 claims description 9
- 238000001259 photo etching Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12304383A JPS6014121A (ja) | 1983-07-05 | 1983-07-05 | 層流素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12304383A JPS6014121A (ja) | 1983-07-05 | 1983-07-05 | 層流素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6014121A true JPS6014121A (ja) | 1985-01-24 |
JPH0140300B2 JPH0140300B2 (enrdf_load_stackoverflow) | 1989-08-28 |
Family
ID=14850791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12304383A Granted JPS6014121A (ja) | 1983-07-05 | 1983-07-05 | 層流素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6014121A (enrdf_load_stackoverflow) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01272921A (ja) * | 1988-04-25 | 1989-10-31 | Cosmo Keiki:Kk | 流量変換装置 |
JPH01299416A (ja) * | 1988-05-26 | 1989-12-04 | Cosmo Keiki:Kk | 流量変換装置 |
JP2001336958A (ja) * | 2000-05-26 | 2001-12-07 | Stec Inc | 流量検出機構 |
JP2006519997A (ja) * | 2003-03-12 | 2006-08-31 | ローズマウント インコーポレイテッド | マルチセンサを備えた流量装置 |
JP2007086063A (ja) * | 2005-08-26 | 2007-04-05 | Smc Corp | 流量計 |
JP2007531931A (ja) * | 2004-02-27 | 2007-11-08 | 株式会社堀場エステック | フローリストリクタ |
JP2009198243A (ja) * | 2008-02-20 | 2009-09-03 | Yamatake Corp | 流量計 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2929248A (en) * | 1957-11-13 | 1960-03-22 | Bailey Meter Co | Flow meter |
JPS49123071A (enrdf_load_stackoverflow) * | 1973-03-16 | 1974-11-25 | ||
JPS5336792A (en) * | 1976-09-17 | 1978-04-05 | Toyota Motor Corp | Machine tool |
JPS53144371A (en) * | 1977-05-21 | 1978-12-15 | Tokyo Seimitsu Co Ltd | Flow meter |
-
1983
- 1983-07-05 JP JP12304383A patent/JPS6014121A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2929248A (en) * | 1957-11-13 | 1960-03-22 | Bailey Meter Co | Flow meter |
JPS49123071A (enrdf_load_stackoverflow) * | 1973-03-16 | 1974-11-25 | ||
JPS5336792A (en) * | 1976-09-17 | 1978-04-05 | Toyota Motor Corp | Machine tool |
JPS53144371A (en) * | 1977-05-21 | 1978-12-15 | Tokyo Seimitsu Co Ltd | Flow meter |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01272921A (ja) * | 1988-04-25 | 1989-10-31 | Cosmo Keiki:Kk | 流量変換装置 |
JPH01299416A (ja) * | 1988-05-26 | 1989-12-04 | Cosmo Keiki:Kk | 流量変換装置 |
JP2001336958A (ja) * | 2000-05-26 | 2001-12-07 | Stec Inc | 流量検出機構 |
JP2006519997A (ja) * | 2003-03-12 | 2006-08-31 | ローズマウント インコーポレイテッド | マルチセンサを備えた流量装置 |
JP2007531931A (ja) * | 2004-02-27 | 2007-11-08 | 株式会社堀場エステック | フローリストリクタ |
JP2007086063A (ja) * | 2005-08-26 | 2007-04-05 | Smc Corp | 流量計 |
JP2009198243A (ja) * | 2008-02-20 | 2009-09-03 | Yamatake Corp | 流量計 |
Also Published As
Publication number | Publication date |
---|---|
JPH0140300B2 (enrdf_load_stackoverflow) | 1989-08-28 |
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