JPH0140096B2 - - Google Patents
Info
- Publication number
- JPH0140096B2 JPH0140096B2 JP60062974A JP6297485A JPH0140096B2 JP H0140096 B2 JPH0140096 B2 JP H0140096B2 JP 60062974 A JP60062974 A JP 60062974A JP 6297485 A JP6297485 A JP 6297485A JP H0140096 B2 JPH0140096 B2 JP H0140096B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- copper material
- wire
- ppm
- extremely soft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052802 copper Inorganic materials 0.000 claims description 37
- 239000010949 copper Substances 0.000 claims description 37
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 15
- 238000007670 refining Methods 0.000 claims description 7
- 238000004857 zone melting Methods 0.000 claims description 6
- 150000001879 copper Chemical class 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 238000000746 purification Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000012733 comparative method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000967 As alloy Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- -1 oxygen-free copper Chemical compound 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
Landscapes
- Manufacture And Refinement Of Metals (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60062974A JPS61221335A (ja) | 1985-03-27 | 1985-03-27 | 極軟質銅材の製造法 |
US06/844,350 US4676827A (en) | 1985-03-27 | 1986-03-26 | Wire for bonding a semiconductor device and process for producing the same |
GB8607528A GB2175009B (en) | 1985-03-27 | 1986-03-26 | Wire for bonding a semiconductor device and process for producing the same |
DE19863610587 DE3610587A1 (de) | 1985-03-27 | 1986-03-27 | Zum bonden von halbleitervorrichtungen geeigneter draht und verfahren zu dessen herstellung |
US07/036,249 US4717436A (en) | 1985-03-27 | 1987-04-09 | Wire for bonding a semiconductor device |
GB8828948A GB2210061B (en) | 1985-03-27 | 1988-12-12 | Wire for use in the bonding of a semiconductor device |
SG93090A SG93090G (en) | 1985-03-27 | 1990-11-17 | Wire for use in the bonding of a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60062974A JPS61221335A (ja) | 1985-03-27 | 1985-03-27 | 極軟質銅材の製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61221335A JPS61221335A (ja) | 1986-10-01 |
JPH0140096B2 true JPH0140096B2 (de) | 1989-08-25 |
Family
ID=13215831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60062974A Granted JPS61221335A (ja) | 1985-03-27 | 1985-03-27 | 極軟質銅材の製造法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61221335A (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62127437A (ja) * | 1985-11-26 | 1987-06-09 | Tatsuta Electric Wire & Cable Co Ltd | 半導体素子用ボンデイング線 |
JP2553082B2 (ja) * | 1987-05-26 | 1996-11-13 | 日立電線株式会社 | 銅の精製方法 |
JPH01159338A (ja) * | 1987-12-15 | 1989-06-22 | Fujikura Ltd | 極細線用銅線材 |
CN113290217B (zh) * | 2021-05-28 | 2022-09-23 | 金川集团股份有限公司 | 高纯无氧铜杆的真空连铸工艺 |
-
1985
- 1985-03-27 JP JP60062974A patent/JPS61221335A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61221335A (ja) | 1986-10-01 |
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