JPH01266812A - 液体の脱気および濾過のための方法および装置 - Google Patents
液体の脱気および濾過のための方法および装置Info
- Publication number
- JPH01266812A JPH01266812A JP63329549A JP32954988A JPH01266812A JP H01266812 A JPH01266812 A JP H01266812A JP 63329549 A JP63329549 A JP 63329549A JP 32954988 A JP32954988 A JP 32954988A JP H01266812 A JPH01266812 A JP H01266812A
- Authority
- JP
- Japan
- Prior art keywords
- main filter
- filter
- stream
- liquid
- degassing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 37
- 238000001914 filtration Methods 0.000 title claims abstract description 26
- 238000007872 degassing Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims description 35
- 238000010992 reflux Methods 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims description 17
- 238000011010 flushing procedure Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 8
- 230000001105 regulatory effect Effects 0.000 abstract description 7
- 238000004140 cleaning Methods 0.000 abstract description 5
- 239000002245 particle Substances 0.000 description 21
- 239000007787 solid Substances 0.000 description 12
- 230000007547 defect Effects 0.000 description 7
- 239000004744 fabric Substances 0.000 description 5
- 239000000839 emulsion Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000011064 split stream procedure Methods 0.000 description 3
- 108010010803 Gelatin Proteins 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229920000159 gelatin Polymers 0.000 description 2
- 239000008273 gelatin Substances 0.000 description 2
- 235000019322 gelatine Nutrition 0.000 description 2
- 235000011852 gelatine desserts Nutrition 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000012209 synthetic fiber Substances 0.000 description 2
- 229920002994 synthetic fiber Polymers 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011118 depth filtration Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012065 filter cake Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
- B01D36/02—Combinations of filters of different kinds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
- B01D29/05—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements supported
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/62—Regenerating the filter material in the filter
- B01D29/66—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps
- B01D29/68—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps with backwash arms, shoes or nozzles
- B01D29/682—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps with backwash arms, shoes or nozzles with a rotary movement with respect to the filtering element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/62—Regenerating the filter material in the filter
- B01D29/66—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps
- B01D29/68—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps with backwash arms, shoes or nozzles
- B01D29/688—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps with backwash arms, shoes or nozzles with backwash arms or shoes acting on the cake side
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/88—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices
- B01D29/885—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices with internal recirculation through the filtering element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
- B01D36/001—Filters in combination with devices for the removal of gas, air purge systems
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Filtration Of Liquid (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3744422A DE3744422C1 (de) | 1987-12-29 | 1987-12-29 | Verfahren und Vorrichtung zur Entgasung und Filtration von Fluessigkeiten |
DE3744422.0 | 1987-12-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01266812A true JPH01266812A (ja) | 1989-10-24 |
JPH0349603B2 JPH0349603B2 (US20050021378A1-20050127-P00601.png) | 1991-07-30 |
Family
ID=6343791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63329549A Granted JPH01266812A (ja) | 1987-12-29 | 1988-12-28 | 液体の脱気および濾過のための方法および装置 |
Country Status (4)
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015073915A (ja) * | 2013-10-04 | 2015-04-20 | 東京エレクトロン株式会社 | 気泡除去方法、気泡除去装置、脱気装置、及びコンピュータ読み取り可能な記録媒体 |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3903813C1 (US20050021378A1-20050127-P00601.png) * | 1989-02-09 | 1990-06-07 | Bott, Reinhard, Dr.-Ing. | |
JP2630481B2 (ja) * | 1990-01-08 | 1997-07-16 | 富士写真フイルム株式会社 | 塗布液の送液方法 |
JPH03258341A (ja) * | 1990-03-06 | 1991-11-18 | Konica Corp | 有機溶剤の除去方法 |
DE4311297A1 (de) * | 1993-04-06 | 1994-10-13 | Gessner & Co Gmbh | Regenerierbare Separationselemente, deren Verwendung und dafür geeignete Gehäuse |
US5834625A (en) * | 1996-08-21 | 1998-11-10 | Eastman Kodak Company | Apparatus and method for debubbling a discrete sample of liquid |
US5989317A (en) * | 1997-05-14 | 1999-11-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for recovering process liquid and eliminating trapped air |
GB2333476B (en) * | 1998-01-27 | 2002-07-31 | Eastman Kodak Co | Coating method and apparatus |
DE19810518A1 (de) * | 1998-03-11 | 1999-09-16 | Mann & Hummel Filter | Verfahren zum Rückspülen eines Filters und rückspülbare Filtereinrichtung |
JP3461725B2 (ja) * | 1998-06-26 | 2003-10-27 | 東京エレクトロン株式会社 | 処理液供給装置及び処理液供給方法 |
US6402821B1 (en) * | 1998-08-18 | 2002-06-11 | Tokyo Electron Limited | Filter unit and solution treatment unit |
EP1069474A1 (en) * | 1999-07-12 | 2001-01-17 | Chugai Photo Chemical Co. Ltd. | Solution feeding apparatus and method |
US6395064B1 (en) * | 1999-10-26 | 2002-05-28 | American Air Liquide, Inc | System and method for purifying and distributing chemical gases |
US6500242B2 (en) * | 2001-01-04 | 2002-12-31 | Taiwan Semiconductor Manufacturing Company, Ltd | Apparatus and method for degassing and preventing gelation in a viscous liquid |
US6648943B2 (en) * | 2001-12-21 | 2003-11-18 | Eastman Kodak Company | Integrated use of deaeration methods to reduce bubbles and liquid waste |
JP3890229B2 (ja) * | 2001-12-27 | 2007-03-07 | 株式会社コガネイ | 薬液供給装置および薬液供給装置の脱気方法 |
JP3947398B2 (ja) * | 2001-12-28 | 2007-07-18 | 株式会社コガネイ | 薬液供給装置および薬液供給方法 |
US6808305B2 (en) * | 2002-03-25 | 2004-10-26 | Sharpe Mixers, Inc. | Method and apparatus for mixing additives with sludge in a powered line blender |
US6796776B2 (en) * | 2002-10-23 | 2004-09-28 | Dimension One Spas | Pumping system and method with improved screen |
US7948604B2 (en) * | 2002-12-10 | 2011-05-24 | Nikon Corporation | Exposure apparatus and method for producing device |
US7684008B2 (en) | 2003-06-11 | 2010-03-23 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2005191393A (ja) * | 2003-12-26 | 2005-07-14 | Canon Inc | 露光方法及び装置 |
US7291267B2 (en) * | 2004-01-30 | 2007-11-06 | Ljc Technologies, L.L.C. | Molecular separator |
DE102004019981A1 (de) * | 2004-04-23 | 2005-11-17 | Mann + Hummel Gmbh | Filtrierverfahren |
DE102004021130A1 (de) * | 2004-04-29 | 2005-11-24 | Honeywell Technologies S.A.R.L. | Vorrichtung zum Trennen von Partikeln aus strömenden kompressiblen oder inkompressiblen Fluiden und Verfahren zum Spülen einer solchen Verbindung |
US7428038B2 (en) * | 2005-02-28 | 2008-09-23 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
KR100772844B1 (ko) * | 2005-11-30 | 2007-11-02 | 삼성전자주식회사 | 반도체 제조설비의 감광액 공급장치 |
US8029584B2 (en) | 2007-06-06 | 2011-10-04 | Castronovo Charles A | Vacuum cleaners with self-cleaning filtration, and other self-cleaning filters |
KR101107169B1 (ko) * | 2009-08-26 | 2012-01-25 | 삼성모바일디스플레이주식회사 | 수지 유체 디스펜싱 장치 |
US8152904B2 (en) * | 2009-09-29 | 2012-04-10 | Liposonix, Inc. | Liquid degas system |
CN104056487A (zh) * | 2013-03-19 | 2014-09-24 | 山东工大机械有限公司 | 双级调味品过滤机 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1577839A (en) * | 1925-03-17 | 1926-03-23 | Albert E F Moone | Web-drying device |
US2094863A (en) * | 1934-06-23 | 1937-10-05 | Oliver United Filters Inc | Filter |
NL281849A (US20050021378A1-20050127-P00601.png) * | 1961-08-12 | |||
US3275151A (en) * | 1965-07-19 | 1966-09-27 | S P Kinney Engineering Inc | Disc-type strainer |
DE1536822A1 (de) * | 1967-02-13 | 1970-02-12 | Heinemann Geb Krug | Verfahren zum Filtern von Fluessigkeiten |
US3635348A (en) * | 1970-06-09 | 1972-01-18 | Kinney Eng Inc S P | Automatic self-cleaning strainers |
US3640395A (en) * | 1970-09-14 | 1972-02-08 | Kinney Eng Inc S P | Automatic self-cleaning strainer |
US3734299A (en) * | 1970-12-28 | 1973-05-22 | Kanagawa Kiki Kogyo Co Ltd | Automatic continuously backflow washing-type filter |
US3784016A (en) * | 1971-06-30 | 1974-01-08 | Kanagawa Kiki Kogyo Co Ltd | Automatic continuously backflow washing-type filter |
GB1441575A (en) * | 1972-08-31 | 1976-07-07 | Agfa Gevaert | Method for degassing a circuit for the transport of liquids |
DE2502669C2 (de) * | 1975-01-23 | 1977-01-20 | Siemens Werner Erik | Vorrichtung zum abscheiden und austragen von feststoffteilchen aus einer unter druck stehenden fluessigkeit |
DE2601732C3 (de) * | 1976-01-19 | 1980-06-12 | Boll & Kirch Filterbau Gmbh, 5000 Koeln | Verfahren zum Spülen der Filterkammern eines Filteraggregates und Filteraggregat zur Durchführung dieses Verfahrens |
DE2737135C2 (de) * | 1977-08-17 | 1983-04-07 | Penzenskij zavod chimičeskogo mašinostroenija, Penza | Flüssigkeitsfilter |
GB1559639A (en) * | 1977-08-18 | 1980-01-23 | Proizv Obiedine Tekhenergokhim | Filter for cleaning liquids |
US4298357A (en) * | 1978-07-10 | 1981-11-03 | Baxter Travenol Laboratories, Inc. | Degassing system |
DE3032690A1 (de) * | 1980-08-29 | 1982-05-06 | Agfa-Gevaert Ag, 5090 Leverkusen | Verfahren und vorrichtung zur kontinuierlichen filterung von fluessigkeiten |
US4428757A (en) * | 1981-09-22 | 1984-01-31 | Hall Mark N | Sonic energy fluid degassing unit |
US4482461A (en) * | 1982-12-20 | 1984-11-13 | French Systems, Inc. | Backwash control for constant volume-pressure filtration system |
GB8419035D0 (en) * | 1984-07-26 | 1984-08-30 | Water Res Centre | Dewatering solids suspensions |
GB8425068D0 (en) * | 1984-10-04 | 1984-11-07 | Swinney Eng | Automatic backwashing filter |
US4818420A (en) * | 1987-05-15 | 1989-04-04 | Uddo Mims International, Inc. | Backwash filter |
US4781825A (en) * | 1987-12-14 | 1988-11-01 | Conoco Inc. | Filter with self-actuating rotating backwash selector |
-
1987
- 1987-12-29 DE DE3744422A patent/DE3744422C1/de not_active Expired
-
1988
- 1988-11-22 US US07/274,434 patent/US4935151A/en not_active Expired - Fee Related
- 1988-12-14 EP EP88120909A patent/EP0322649B1/de not_active Expired - Lifetime
- 1988-12-14 DE DE88120909T patent/DE3882958D1/de not_active Expired - Fee Related
- 1988-12-28 JP JP63329549A patent/JPH01266812A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015073915A (ja) * | 2013-10-04 | 2015-04-20 | 東京エレクトロン株式会社 | 気泡除去方法、気泡除去装置、脱気装置、及びコンピュータ読み取り可能な記録媒体 |
Also Published As
Publication number | Publication date |
---|---|
EP0322649A2 (de) | 1989-07-05 |
EP0322649A3 (en) | 1989-08-02 |
DE3744422C1 (de) | 1989-07-06 |
JPH0349603B2 (US20050021378A1-20050127-P00601.png) | 1991-07-30 |
DE3882958D1 (US20050021378A1-20050127-P00601.png) | 1993-09-09 |
EP0322649B1 (de) | 1993-08-04 |
US4935151A (en) | 1990-06-19 |
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