JPH01261210A - 三弗化窒素ガスの精製方法 - Google Patents

三弗化窒素ガスの精製方法

Info

Publication number
JPH01261210A
JPH01261210A JP63090032A JP9003288A JPH01261210A JP H01261210 A JPH01261210 A JP H01261210A JP 63090032 A JP63090032 A JP 63090032A JP 9003288 A JP9003288 A JP 9003288A JP H01261210 A JPH01261210 A JP H01261210A
Authority
JP
Japan
Prior art keywords
solid fluoride
fluoride
gas
solid
cylindrical container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63090032A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474284B2 (enrdf_load_stackoverflow
Inventor
Isao Harada
功 原田
Hisashi Hokonohara
鉾之原　久
Toshiaki Yamaguchi
俊明 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP63090032A priority Critical patent/JPH01261210A/ja
Priority to CA000595889A priority patent/CA1318108C/en
Priority to DE89106050T priority patent/DE68907366T2/de
Priority to EP89106050A priority patent/EP0337294B1/en
Priority to US07/334,529 priority patent/US4948571A/en
Priority to KR1019890004776A priority patent/KR910004831B1/ko
Publication of JPH01261210A publication Critical patent/JPH01261210A/ja
Publication of JPH0474284B2 publication Critical patent/JPH0474284B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP63090032A 1988-04-11 1988-04-12 三弗化窒素ガスの精製方法 Granted JPH01261210A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP63090032A JPH01261210A (ja) 1988-04-12 1988-04-12 三弗化窒素ガスの精製方法
CA000595889A CA1318108C (en) 1988-04-11 1989-04-06 Process for purifying nitrogen trifluoride gas
DE89106050T DE68907366T2 (de) 1988-04-11 1989-04-06 Verfahren zur Raffinierung von Stickstofftrifluoridgas.
EP89106050A EP0337294B1 (en) 1988-04-11 1989-04-06 Process for purifying nitrogen trifluoride gas
US07/334,529 US4948571A (en) 1988-04-11 1989-04-07 Process for purifying nitrogen trifluoride gas
KR1019890004776A KR910004831B1 (ko) 1988-04-11 1989-04-11 삼불화질소 기체의 정제방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63090032A JPH01261210A (ja) 1988-04-12 1988-04-12 三弗化窒素ガスの精製方法

Publications (2)

Publication Number Publication Date
JPH01261210A true JPH01261210A (ja) 1989-10-18
JPH0474284B2 JPH0474284B2 (enrdf_load_stackoverflow) 1992-11-25

Family

ID=13987324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63090032A Granted JPH01261210A (ja) 1988-04-11 1988-04-12 三弗化窒素ガスの精製方法

Country Status (1)

Country Link
JP (1) JPH01261210A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009072360A1 (ja) 2007-12-03 2009-06-11 Central Glass Company, Limited ＣｌＯ３Ｆの除去方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009072360A1 (ja) 2007-12-03 2009-06-11 Central Glass Company, Limited ＣｌＯ３Ｆの除去方法

Also Published As

Publication number Publication date
JPH0474284B2 (enrdf_load_stackoverflow) 1992-11-25

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