JPH01261207A - 三弗化窒素ガスの精製方法 - Google Patents

三弗化窒素ガスの精製方法

Info

Publication number
JPH01261207A
JPH01261207A JP63087209A JP8720988A JPH01261207A JP H01261207 A JPH01261207 A JP H01261207A JP 63087209 A JP63087209 A JP 63087209A JP 8720988 A JP8720988 A JP 8720988A JP H01261207 A JPH01261207 A JP H01261207A
Authority
JP
Japan
Prior art keywords
gas
fluoride
cylindrical container
nitrogen trifluoride
solid fluoride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63087209A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474283B2 (enrdf_load_stackoverflow
Inventor
Isao Harada
功 原田
Hisashi Hokonohara
鉾之原　久
Toshiaki Yamaguchi
俊明 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP63087209A priority Critical patent/JPH01261207A/ja
Priority to CA000595889A priority patent/CA1318108C/en
Priority to EP89106050A priority patent/EP0337294B1/en
Priority to DE89106050T priority patent/DE68907366T2/de
Priority to US07/334,529 priority patent/US4948571A/en
Priority to KR1019890004776A priority patent/KR910004831B1/ko
Publication of JPH01261207A publication Critical patent/JPH01261207A/ja
Publication of JPH0474283B2 publication Critical patent/JPH0474283B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP63087209A 1988-04-11 1988-04-11 三弗化窒素ガスの精製方法 Granted JPH01261207A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP63087209A JPH01261207A (ja) 1988-04-11 1988-04-11 三弗化窒素ガスの精製方法
CA000595889A CA1318108C (en) 1988-04-11 1989-04-06 Process for purifying nitrogen trifluoride gas
EP89106050A EP0337294B1 (en) 1988-04-11 1989-04-06 Process for purifying nitrogen trifluoride gas
DE89106050T DE68907366T2 (de) 1988-04-11 1989-04-06 Verfahren zur Raffinierung von Stickstofftrifluoridgas.
US07/334,529 US4948571A (en) 1988-04-11 1989-04-07 Process for purifying nitrogen trifluoride gas
KR1019890004776A KR910004831B1 (ko) 1988-04-11 1989-04-11 삼불화질소 기체의 정제방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63087209A JPH01261207A (ja) 1988-04-11 1988-04-11 三弗化窒素ガスの精製方法

Publications (2)

Publication Number Publication Date
JPH01261207A true JPH01261207A (ja) 1989-10-18
JPH0474283B2 JPH0474283B2 (enrdf_load_stackoverflow) 1992-11-25

Family

ID=13908556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63087209A Granted JPH01261207A (ja) 1988-04-11 1988-04-11 三弗化窒素ガスの精製方法

Country Status (1)

Country Link
JP (1) JPH01261207A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0474283B2 (enrdf_load_stackoverflow) 1992-11-25

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