JPH0122738B2 - - Google Patents

Info

Publication number
JPH0122738B2
JPH0122738B2 JP4293484A JP4293484A JPH0122738B2 JP H0122738 B2 JPH0122738 B2 JP H0122738B2 JP 4293484 A JP4293484 A JP 4293484A JP 4293484 A JP4293484 A JP 4293484A JP H0122738 B2 JPH0122738 B2 JP H0122738B2
Authority
JP
Japan
Prior art keywords
film
pattern
deposited
opening
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4293484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60189241A (ja
Inventor
Tooru Mogami
Mitsutaka Morimoto
Hidekazu Okabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4293484A priority Critical patent/JPS60189241A/ja
Publication of JPS60189241A publication Critical patent/JPS60189241A/ja
Publication of JPH0122738B2 publication Critical patent/JPH0122738B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4293484A 1984-03-08 1984-03-08 段差の被覆方法 Granted JPS60189241A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4293484A JPS60189241A (ja) 1984-03-08 1984-03-08 段差の被覆方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4293484A JPS60189241A (ja) 1984-03-08 1984-03-08 段差の被覆方法

Publications (2)

Publication Number Publication Date
JPS60189241A JPS60189241A (ja) 1985-09-26
JPH0122738B2 true JPH0122738B2 (enExample) 1989-04-27

Family

ID=12649838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4293484A Granted JPS60189241A (ja) 1984-03-08 1984-03-08 段差の被覆方法

Country Status (1)

Country Link
JP (1) JPS60189241A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01107557A (ja) * 1987-10-21 1989-04-25 Agency Of Ind Science & Technol 配線の形成方法
JPH0680736B2 (ja) * 1987-10-21 1994-10-12 工業技術院長 配線の形成方法

Also Published As

Publication number Publication date
JPS60189241A (ja) 1985-09-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term