JPH0121563Y2 - - Google Patents

Info

Publication number
JPH0121563Y2
JPH0121563Y2 JP1986044260U JP4426086U JPH0121563Y2 JP H0121563 Y2 JPH0121563 Y2 JP H0121563Y2 JP 1986044260 U JP1986044260 U JP 1986044260U JP 4426086 U JP4426086 U JP 4426086U JP H0121563 Y2 JPH0121563 Y2 JP H0121563Y2
Authority
JP
Japan
Prior art keywords
orientation flat
wafer
optical sensor
pulse motor
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986044260U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62157150U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986044260U priority Critical patent/JPH0121563Y2/ja
Publication of JPS62157150U publication Critical patent/JPS62157150U/ja
Application granted granted Critical
Publication of JPH0121563Y2 publication Critical patent/JPH0121563Y2/ja
Expired legal-status Critical Current

Links

JP1986044260U 1986-03-26 1986-03-26 Expired JPH0121563Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986044260U JPH0121563Y2 (en, 2012) 1986-03-26 1986-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986044260U JPH0121563Y2 (en, 2012) 1986-03-26 1986-03-26

Publications (2)

Publication Number Publication Date
JPS62157150U JPS62157150U (en, 2012) 1987-10-06
JPH0121563Y2 true JPH0121563Y2 (en, 2012) 1989-06-27

Family

ID=30861899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986044260U Expired JPH0121563Y2 (en, 2012) 1986-03-26 1986-03-26

Country Status (1)

Country Link
JP (1) JPH0121563Y2 (en, 2012)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539901A (en) * 1978-08-09 1980-03-21 Hitachi Denshi Ltd Integrating multiplication system of digital differential analyzer
US4507078A (en) * 1983-03-28 1985-03-26 Silicon Valley Group, Inc. Wafer handling apparatus and method
JPS61234544A (ja) * 1985-04-11 1986-10-18 Daiichi Seiki Kk ウエハ−の位置決め装置

Also Published As

Publication number Publication date
JPS62157150U (en, 2012) 1987-10-06

Similar Documents

Publication Publication Date Title
JP5255680B2 (ja) 切削ウォームのねじ山間隙にドレッシング工具をセンタリングするための装置ならびに方法
CN208759384U (zh) 一种圆盘类零件的定位机构
JPH0121563Y2 (en, 2012)
US5982492A (en) Method of and apparatus for determining the center of a generally circular workpiece relative to a rotation axis of the workpiece
JP2509050B2 (ja) オ―バ―ラップ量測定装置
JPS57187610A (en) Measuring device for coaxial degree of tubular and cylindrical objects
US4736325A (en) Method and apparatus for searching for a fiducial point of machining relating to C-axis
JP2558484B2 (ja) ウエハの位置決め装置
JPH0215340B2 (en, 2012)
JPS63159708A (ja) 円筒形状物の軸中心検出装置
JPH021626B2 (en, 2012)
JPS61134801A (ja) 位置決め制御装置
JP3025369U (ja) 不釣合い修正機能付旋盤
JP2980974B2 (ja) 釣合い試験機における回転体の位置決め装置
JPH0737967A (ja) ウエハの位置合わせ装置および位置合わせ方法
JPH0756611A (ja) ボートセンタ位置検知方法及び装置
JPH0972724A (ja) 巻枠鍔の変形検査方法及び装置
CN209102003U (zh) 一种用于叶轮轮毂的加工前检测装置
JPH0453884Y2 (en, 2012)
JPH06218662A (ja) 周面に溝をもつワークの加工方法及び装置
JPS62206847A (ja) 半導体ウエハ−の位置決め方法及び装置
JP2538579Y2 (ja) 回転角度検出装置を備えたセグメント組立エレクター
JPH0610272Y2 (ja) 動釣合試験機
JP2753350B2 (ja) ワークの溝位置測定装置
JPH0740192Y2 (ja) 動釣合修正装置