JPH0118936Y2 - - Google Patents

Info

Publication number
JPH0118936Y2
JPH0118936Y2 JP15905583U JP15905583U JPH0118936Y2 JP H0118936 Y2 JPH0118936 Y2 JP H0118936Y2 JP 15905583 U JP15905583 U JP 15905583U JP 15905583 U JP15905583 U JP 15905583U JP H0118936 Y2 JPH0118936 Y2 JP H0118936Y2
Authority
JP
Japan
Prior art keywords
gas
flow path
gas flow
diaphragm
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15905583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5983260U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15905583U priority Critical patent/JPS5983260U/ja
Publication of JPS5983260U publication Critical patent/JPS5983260U/ja
Application granted granted Critical
Publication of JPH0118936Y2 publication Critical patent/JPH0118936Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Multiple-Way Valves (AREA)
  • Control Of Non-Electrical Variables (AREA)
JP15905583U 1983-10-13 1983-10-13 可変定流量比混合装置 Granted JPS5983260U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15905583U JPS5983260U (ja) 1983-10-13 1983-10-13 可変定流量比混合装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15905583U JPS5983260U (ja) 1983-10-13 1983-10-13 可変定流量比混合装置

Publications (2)

Publication Number Publication Date
JPS5983260U JPS5983260U (ja) 1984-06-05
JPH0118936Y2 true JPH0118936Y2 (OSRAM) 1989-06-01

Family

ID=30350240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15905583U Granted JPS5983260U (ja) 1983-10-13 1983-10-13 可変定流量比混合装置

Country Status (1)

Country Link
JP (1) JPS5983260U (OSRAM)

Also Published As

Publication number Publication date
JPS5983260U (ja) 1984-06-05

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