JPS5983260U - 可変定流量比混合装置 - Google Patents

可変定流量比混合装置

Info

Publication number
JPS5983260U
JPS5983260U JP15905583U JP15905583U JPS5983260U JP S5983260 U JPS5983260 U JP S5983260U JP 15905583 U JP15905583 U JP 15905583U JP 15905583 U JP15905583 U JP 15905583U JP S5983260 U JPS5983260 U JP S5983260U
Authority
JP
Japan
Prior art keywords
diaphragm
flow path
gas flow
constant flow
variable constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15905583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0118936Y2 (OSRAM
Inventor
柳田　祥男
岩本　三千範
浩一 橋本
秀 水口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Estech Corp
Original Assignee
Estech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Estech Corp filed Critical Estech Corp
Priority to JP15905583U priority Critical patent/JPS5983260U/ja
Publication of JPS5983260U publication Critical patent/JPS5983260U/ja
Application granted granted Critical
Publication of JPH0118936Y2 publication Critical patent/JPH0118936Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Multiple-Way Valves (AREA)
  • Control Of Non-Electrical Variables (AREA)
JP15905583U 1983-10-13 1983-10-13 可変定流量比混合装置 Granted JPS5983260U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15905583U JPS5983260U (ja) 1983-10-13 1983-10-13 可変定流量比混合装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15905583U JPS5983260U (ja) 1983-10-13 1983-10-13 可変定流量比混合装置

Publications (2)

Publication Number Publication Date
JPS5983260U true JPS5983260U (ja) 1984-06-05
JPH0118936Y2 JPH0118936Y2 (OSRAM) 1989-06-01

Family

ID=30350240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15905583U Granted JPS5983260U (ja) 1983-10-13 1983-10-13 可変定流量比混合装置

Country Status (1)

Country Link
JP (1) JPS5983260U (OSRAM)

Also Published As

Publication number Publication date
JPH0118936Y2 (OSRAM) 1989-06-01

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