JPH0118936Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides an apparatus for mixing two dissimilar gases, in particular, which can be switched to a predetermined desired flow rate ratio in a single operation, and once a certain flow rate ratio has been set; This device relates to a variable constant flow ratio mixing device that can vary the flow rate of mixed gas while keeping the flow rate constant.It has a simple structure with a small number of parts, and as mentioned above, it can adjust any flow rate at a desired constant flow rate. The main objective is to provide a mixing device capable of supplying mixed gases.

First, an embodiment of the present invention will be described based on the drawings. In the figure, 1A is a first block in which a first gas flow path 2 is formed, and 1B is a second block in which a second gas flow path 3 is formed. A primary side diaphragm chamber portion 12 communicating with the two gas flow paths 3 is formed,
Also, a passage 1 is provided on the end face of the first block 1A.
A secondary diaphragm chamber portion 14 communicating with the first gas flow path 2 through 3 is formed. and,
These two blocks 1A, 1B are joined together to form the diaphragm chamber portions 12, 14 on the primary side and the secondary side.
A diaphragm chamber is formed between the two blocks 1A and 1B, and a diaphragm chamber is formed between the blocks 1A and 1B.
The regulator 4 is constructed by interposing a diaphragm 15 between the joints thereof, and providing a pilot valve 16 that adjusts the opening degree of the first gas passage 2 by the response of the diaphragm 15.

P ₁ and P ₂ are the first gas flow path 2 and the second gas flow path, respectively.
These are a first gas supply pump and a second gas supply pump connected to the gas flow path 3.

Next, 5 is the third block, and the above-mentioned both blocks 1
A flow path 2 that is connected and fixed to A and 1B and communicates with the first gas flow path 2 and the second gas flow path 3, respectively.
a, 3a, a division switch 6, and a plurality of capillary elements 7
_{1, 2, 3, 4, 5} , and a mixing section 8.

The division switch 6 has a structure in which a rotor is provided on the block 5 and rotates while sliding by operating a switching knob (not shown), and a first rotor is provided on the block 5 side.
The outlet port 2' of the gas flow path 2, the outlet port 3' of the second gas flow path 3, and the inlet port 7' of a plurality of capillary elements 7 _1,2,3,4,5 of the same shape and dimensions _{1,2, 3, 4, 5} are arranged on the same circumference, and on the rotor side, each port 2', 3', 7' has the same radius as the arrangement radius of 1, 2, 3, _{4, 5} . Two semicircular grooves 9a and 9b are formed. One groove 9a closes the first gas flow path 2 or communicates with a part or all of the capillary element 7 ₁ .
The other groove 9b communicates the second gas flow path 3 with the remaining capillary elements. In the illustrated state, the first gas flow path 2 communicates with two capillary elements 7 ₁ , 7 ₂ , and the second gas flow channel 3 communicates with the remaining three capillary elements 7 ₃ , 7 ₄ , 7 ₅ has been done. As the switching knob is rotated in the direction of arrow a from the illustrated state, the number of capillary elements communicated with the first gas flow path 2 increases, and the number of capillary elements communicated with the second gas flow path 3 increases. decreases accordingly. On the other hand, when the switching knob is rotated in the direction opposite to arrow a, the number of capillary elements communicating with the first gas flow path 2 decreases and the number of capillary elements communicating with the second gas flow path 3 increases, contrary to the above. . In this case, since the gases respectively switched flow within the capillary elements, the number of capillary elements and the gas flow rate are proportional to each combination.
Therefore, by operating the switching knob, the total flow rate of the mixed gas can be kept constant and the first
The flow rate ratio of the gas and the second gas can be varied. The outlet sides, ie, the downstream sides, of the capillary elements 7 _{1, 2, 3, 4} , and 5 are connected to the mixing section 8 in a concentrated manner. Therefore, each capillary element 7
_{1, 2, 3, 4} , and 5 are mixed in a mixing section 8, and a flow rate adjustment throttle valve 1 is further provided on the downstream side of this mixing section 8.
0 is connected.

Although not shown, if an appropriate filter is provided near the inlet port 7' _{1, 2, 3, 4} , 5 of each capillary element,
This is advantageous because it is possible to filter out the scraping dust and the like generated in the division switch 6.

Now, the regulator 4 controls the primary pressure of the second gas and the pressure of the first gas on the downstream side of the pilot valve 16 to be the same pressure, and the regulator 4 controls the primary pressure of the second gas to be the same pressure as the pressure of the first gas downstream of the pilot valve _{16. , 2, 3, 4, and 5} are all of the same shape and size, so whether the flow of the first and second gases is laminar or turbulent, Even when switching from laminar flow to turbulent flow or from turbulent flow to laminar flow, the flow rate ratio can always be kept constant, and when the flow rate is changed using the flow rate adjustment throttle valve 10, each capillary element The flow rate of changes at the same rate.

Therefore, the flow rate ratio of the gases flowing through both gas flow paths 2 and 3 is always kept constant.

As explained above, the variable constant flow ratio mixing device according to the present invention connects the first block in which the first gas flow path is formed and the second block in which the second gas flow path is formed between the two blocks. A diaphragm chamber is formed and joined together, a diaphragm is interposed between the joint portions of the two blocks, and the first gas flow path and the second gas flow path are separated into diaphragm chamber portions separated by the diaphragm. A regulator is constructed by providing a pilot valve that communicates with the first gas flow path and adjusts the opening degree of the first gas flow path by the response of the diaphragm.
The third block is provided with an outlet port of the first gas flow path, an outlet port of the second gas flow path, and an inlet port of a plurality of capillary elements having the same shape and size, arranged on the same circumference. , and the splitting switch is constructed by sliding a rotor having two semicircular grooves having the same radius as the arrangement radius of each of these ports, and a mixing section is provided downstream of each of the capillary elements. It is characterized in that a flow rate regulating throttle valve is further provided on the downstream side of this mixing section.

Therefore, by adjusting the flow rate adjustment throttle valve provided on the downstream side of the mixing section, the flow rate ratio of the first gas and the second gas (i.e., In addition, the flow rate ratio can be maintained constant regardless of pressure fluctuations of the first gas.

That is, the division switch is provided in a third block connected to a first block and a second block, each of which is provided with a first gas flow path and a second gas flow path; The exit port of the gas flow path, the exit port of the second gas flow path, and the inlet ports of the plurality of capillary elements having the same shape and dimensions are arranged on the same circumference, and have the same radius as the arrangement radius of each of these ports. Since the rotor having two semicircular grooves is configured to slide, as long as the pressure difference between the gas pressure in the second gas flow path and the pressure downstream of the flow rate adjustment throttle valve does not change, the flow rate will not change. The flow rate ratio can be changed step by step with the total flow rate of the mixed gas set to the desired value using the adjustment throttle valve, and the operation for changing the flow rate ratio can be performed extremely easily and accurately. It is.

In addition, since a flow rate adjustment throttle valve is provided on the downstream side of the mixing section, as long as the pressure difference between the gas pressure in the second gas flow path and the pressure downstream of the flow rate adjustment throttle valve does not change, the split switch cannot be operated. When the flow rate ratio of the mixed gas is changed, even if the load resistance changes due to the switching operation, the mixed gas can be flowed further downstream without changing the set flow rate. Furthermore, the flow rate of the mixed gas can be easily changed without changing the flow rate ratio.

Therefore, according to the mixing device of the present invention, two different gases can be mixed at a desired flow rate ratio by simply adjusting the positions of the switching valves from among preset stepwise flow rate ratios. This has the effect that a mixed gas having a desired flow rate ratio mixed with the above gas can be supplied at an appropriate flow rate.

In addition, the number of component parts is regulator, split switch,
Since a small number of capillary elements, a mixing section, and a flow rate adjustment throttle valve are required, the overall configuration can be made simple and compact.

Furthermore, when the second gas stops flowing into the second gas flow path (due to a pump failure, or a gas outage when the second gas is supplied from a cylinder, etc.).
In this case, it is possible to close the first gas flow path, but the opening and closing will be repeated near the closed position.
As a result, the flow rate of the first gas can be zero or only a very small amount can flow, so that, for example, the first gas is a toxic hazardous gas and the second gas is a diluent gas such as air. In such a case, it is possible to prevent a large amount of only the first gas from flowing out when the flow of the second gas is stopped, which is advantageous in terms of safety.

[Brief explanation of drawings]

The figure is a sectional view of a mixing device as an embodiment of the present invention. 1A...first block, 1B...second block, 2...first gas flow path, 2...first gas flow path,
2'... Output port of the first gas flow path, 3... Second
Gas flow path, 3′...output port of the second gas flow path,
4...Scillator, 5...Third block, 6...
...Switching divider, 7 _1,2,3,4,5 ...Thin tube element, 7' _{1,2,3,4
,Five}
... Capillary element inlet port, 8 ... Mixer, 9
a, 9b... Groove, 10... Throttle valve for flow rate adjustment.

Claims (1)

[Scope of utility model registration request] A first block in which a first gas flow path is formed and a second block in which a first gas flow path is formed.
A diaphragm chamber is formed between both blocks, and a diaphragm is interposed between the two blocks, and a diaphragm is interposed between the two blocks. A regulator is configured by providing a pilot valve that connects the two gas passages to the diaphragm chamber portions separated by the diaphragm and adjusting the opening degree of the first gas passage in response to the response of the diaphragm; A third block is connected to both blocks, and the third block is provided with an outlet port of the first gas flow path, an outlet port of the second gas flow path, and an inlet port of a plurality of capillary elements having the same shape and size. are arranged on the same circumference, and a rotor having two semicircular grooves having the same radius as the arrangement radius of each of these ports is slid. A variable constant flow ratio mixing device, characterized in that a mixing section is provided on the downstream side of the element, and a flow rate adjusting throttle valve is further provided on the downstream side of the mixing section.