JP2004070746A - Flow rate adjusting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flow rate adjusting device capable of easily changing a throttle for accurately and stably controlling the flow of fluid. <P>SOLUTION: This flow rate adjusting device is constituted by arranging: a fluid entrance port 11; a fluid exit port 15; passages for connecting the ports 11 and 15; a valve body 30 arranged between the channels; a first valve seat 31 and a second valve seat 32 to be opened and closed according to the operation of the valve body 30; two throttle passages 14 and 18 constituting a portion of the passages connecting those valve seats 31 and 32 and the exit port 15 with predetermined throttle diameters; and a valve guiding means 40 for guiding the valve body 30 relative to the valve seats 31 and 32. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a flow rate adjusting device that adjusts a flow rate, a pressure, and the like by changing a throttle diameter.
[0002]
[Prior art]
2. Description of the Related Art In order to control flow rate adjustment, pressure adjustment, and the like in a circuit through which a fluid flows, an orifice plate (a plate having a throttle) is inserted into a flow path of the circuit to reduce a flow path area. . When adjusting the flow rate and the pressure over a plurality of types, it is common to prepare various orifice plates having different orifice diameters (diameters) and replace them by performing replacement.
[0003]
Further, as a means for changing the flow path area, a needle adjustment valve, which is one of flow rate adjusting devices, has been generally used. According to this needle adjustment valve, the flow path area is changed at any time by moving the position of the needle to an appropriate position. Therefore, it is possible to adjust to the target flow rate and pressure by operating the needle.
[0004]
[Problems to be solved by the invention]
In order to change the orifice diameter (hereinafter referred to as "diaphragm diameter"), it is necessary to cut off the circuit once in order to replace the orifice plate, that is, a joint, a joint, a pipe, or the like having the orifice plate. In this case, in order to disconnect the circuit, it is necessary to stop the flow of the fluid in the circuit, and the supply of the fluid is temporarily stopped. Further, not only can the orifice plate not be replaced immediately, but also impurities may enter the circuit. Also, much labor is required for replacement.
[0005]
Further, with the needle adjustment valve described above, the flow area or the like can be easily adjusted by adjusting the flow path area in a stepless manner, but is not a fixed throttle like an orifice plate because it is not a throttle. However, it is difficult to say that the required flow area can be accurately and reliably obtained to adjust the flow rate. In particular, there is a concern that the needle will move slightly as the elapsed time of use increases, and it is difficult to accurately narrow down the flow path area and stably deliver the needle.
[0006]
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a flow control device capable of easily changing a throttle for accurately and stably controlling a flow of a fluid.
[0007]
[Means for Solving the Problems]
The present invention employs the following means in order to achieve the above object.
The flow rate adjusting device according to the first aspect of the present invention is configured such that, in a housing, an inlet port for a fluid, an outlet port, a flow path connecting these ports, a valve disposed between the flow paths, A plurality of throttle channels that are open facing the outer periphery of the valve body and form a part of the channel that communicates with the outlet port; and at least one of the throttle channels is used to guide fluid to the outlet port. And a valve body guiding means for guiding the movement of the valve body.
[0008]
According to such a configuration, the valve body guiding means moves the valve body, so that at least one of the plurality of throttle channels opened on the outer periphery of the valve body is closed by the valve body to the inlet port side. The fluid enters a conductive state, and the fluid introduced from the inlet port passes through the throttle channel and is sent out from the outlet port. Further, the other throttle passages are appropriately communicated with the inlet port side depending on the moving position of the valve body, and the fluid passing therethrough is sent out from the outlet port.
[0009]
The flow control device according to the second aspect of the present invention is a flow control device, comprising: a housing, an inlet port for a fluid, an outlet port, a flow path connecting these ports, a valve disposed between the flow paths, A first valve seat and a second valve seat that are opened or closed in accordance with the operation of the valve body, and one of the flow paths that has a predetermined throttle diameter between the valve seats and the outlet port and that conducts. It is characterized in that it comprises two throttle channels forming a part, and valve body guiding means for guiding the valve body to each of the valve seats.
[0010]
According to such an invention, when the valve body guiding means guides the valve body, one of the first valve seat and the second valve seat is opened and the other is closed. Then, the fluid introduced from the inlet port passes through a restricting flow path that communicates from the valve seat on the open side to the outlet port, and is sent out from the outlet port in a state in which a flow rate, a pressure, and the like are adjusted by a restrictor therebetween. You.
On the other hand, if the valve seat to be opened is different from the above case, the fluid introduced from the inlet port passes through another throttle flow path that communicates with the same outlet port from this valve seat, and the flow rate and It is delivered from the outlet port in a state where the pressure and the like are adjusted.
That is, by selecting one of the throttles fixedly provided in the flow path, a fluid adjusted to a flow rate, a pressure, or the like corresponding to the diameter of the throttle is sent out from the same outlet port.
If both valve seats are open depending on the position of the valve body, the fluid passes through both throttle passages and is discharged from the outlet port.
[0011]
According to a third aspect of the present invention, in the flow control device according to the first or second aspect, a plurality of the outlet ports are provided on an outer peripheral portion of the housing.
[0012]
According to such an invention, for example, if a valve is provided on a circuit connected to each outlet port, a flow rate adjustment and the like can be performed from the outlet port connected to the valve opened in each valve. Fluid will be delivered and no fluid will be delivered from the outlet port to which the other closed valves are connected.
In other words, the provision of a plurality of connection directions of the outlet ports leads to a configuration in which the supply destination of the fluid whose flow rate is adjusted can be easily changed.
In addition, the throttle flow path that conducts to each outlet port may be a common throttle flow path that conducts from the valve body side to all of the outlet ports, or each of the outlet flow paths that solely conducts to each outlet port from the valve body side. It may be a throttle channel paired with a port.
[0013]
According to a fourth aspect of the present invention, in the flow control device according to any one of the first to third aspects, the valve body guiding means is configured to control the valve body according to a pressure of an externally supplied operating fluid. Characterized in that it has a piston that operates in the same direction as the moving direction.
[0014]
The piston operates in the direction in which the pressure is received by receiving the pressure of the operating fluid on the pressure receiving surface, and guides the valve body to move so that the first valve seat or the second valve seat is opened. Further, the piston is arranged such that its own operation direction is the same as the movement direction of the valve body, so that the operation of the piston is transmitted to the valve body without waste.
[0015]
According to a fifth aspect of the present invention, in the flow control device according to any one of the first to fourth aspects, a seal forming a partition wall of the flow path between the valve body and the valve body guiding means. A member is provided.
[0016]
According to such a configuration, the partition between the component including the space provided with the valve body guiding means and the space forming the flow path provided with the valve body is accurately made by the seal member, and the operation of the valve body guiding means is ensured. And the operation is transmitted to the valve body.
[0017]
According to a sixth aspect of the present invention, in the flow rate adjusting device according to any one of the first to fifth aspects, the throttle passage is provided with a throttle diameter changing means for changing a throttle diameter. Features.
[0018]
The throttle diameter changing means is provided in a part of the throttle flow path. By changing the throttle diameter of the throttle flow path, the throttle flow path referred to here is not always limited to the same throttle diameter. .
For example, it is a configuration in which an adapter having a specific aperture diameter is fitted into a part of the aperture channel, and a plurality of adapters are prepared according to several types of aperture diameters, and these are appropriately replaced. Various flow adjustments and the like can be performed even in the same throttle flow path. Although it is possible to replace the adapter after assembling the device, it is desirable to form a shape for fitting the adapter in advance in the throttle channel and attach an appropriate adapter according to the user's request at the time of assembly. .
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the flow rate adjusting device of the present invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1 and FIG. 2 are cross-sectional views illustrating the internal configuration and structure of the flow control device according to the first embodiment of the present invention. The sectional view of FIG. 1 shows a case where the fluid is sent out by a large throttle, while the sectional view of FIG. 2 shows a case where the fluid is sent out by a small throttle.
[0020]
The housing 10 having an external appearance is formed by combining four blocks each formed of a material such as a resin or a fluorine resin material having excellent chemical resistance. One side of the housing is provided with an inlet port 11 which is connected to a circuit through which the fluid flows and introduces the fluid. An outlet port 15 for sending out is provided. A flow path is formed in the housing 10 so as to conduct between the ports 11 and 15, and the flow path is configured by combining a plurality of paths.
[0021]
Now, the above-mentioned flow path will be described in detail. The flow path is located above the valve chamber 12 on the paper surface with the valve chamber 12 connected to the inlet port 11 that houses the valve body 30 located at the center of the housing 10. One series of flow paths is constituted by the upper space 13 and the first throttle flow path 14 connected to the outlet port 15 from the upper space 13.
Further, as another flow path, the valve chamber 12, a lower space 16 located below the valve chamber 12 on the paper surface, a lower outer peripheral space 17 located outside the lower space 16, and a lower outer peripheral space 17. One series of channels is further constituted by the second throttle channel 18 connected to the outlet port 15.
In other words, the fluid introduced from the inlet port 11 passes through the first throttle channel 14 and is sent out from the outlet port 15 by the operation of the valve 30 described later, or passes through the second throttle channel 18. And is sent out from the same exit port 15.
[0022]
Here, each of the throttle channels 14 and 18 will be described. The first throttle passage 14 that communicates the upper space 13 with the outlet port 15 has a circular cross section, and has a diameter of 8.5 mm as an example. In other words, the diameter of the fluid forms the throttle diameter of the first throttle flow path 14, so that the fluid is sent to the outlet port 15 after the flow rate or the pressure is adjusted according to the throttle diameter.
Also, the second throttle passage 18 that communicates the lower peripheral space 17 connected to the lower space 16 and the outlet port 15 has a circular cross-sectional shape, and has a diameter of 1.0 mm as an example. . In other words, this diameter forms the throttle diameter of the second throttle channel 18, so that the fluid is sent to the outlet port 15 after flow rate adjustment or pressure adjustment according to the throttle diameter. The numerical values of these aperture diameters can be appropriately changed during the manufacturing process.
[0023]
Next, the flow of the fluid by the operation of the valve 30 will be described while describing the configuration of the valve 30 and the valve seats 31 and 32 that receive the movement of the valve 30.
The valve element 30 is provided in the valve chamber 12 forming one of the flow paths as described above, and this shape is formed in a substantially cylindrical shape. Tapered portions are formed at the upper and lower portions of the valve body 30, and two valve seats 31 and 32 are provided in the housing 10 with a predetermined interval so as to sandwich the valve body 30 in accordance with these tapered portions. Are located.
[0024]
Of the valve seats 31 and 32, the first valve seat 31 is located above the center of the valve body 30 and serves to partition the valve chamber 12 and the upper space 13 from each other. When the tapered portion of the valve body 30 is fitted into the opening of the valve seat 31 by moving in the direction, the valve seat 31 is closed. On the other hand, the valve seat that opens is the second valve seat 32, which is located below the center of the valve body 30 and closes when the tapered portion of the valve body 30 is fitted. Therefore, only when one of the valve seats 31 and 32 is opened, the fluid flows through one of the throttle passages 14 and 18 connected to the opened valve seat.
[0025]
Next, a mechanism for guiding the valve body 30 with respect to each of the valve seats 31 and 32 while operating the valve body 30, that is, a configuration of the valve body guiding means according to the present invention will be described. Above the valve body 30, there is provided a block which is a component of a housing having a piston 40 (valve body guiding means). This block and the lower block having the valve body 30 and the like are provided with a diaphragm 35. (Seal member) and are in contact with each other.
[0026]
The diaphragm 35 is fixed to the upper end of the valve body 30 on the lower surface side of the central portion, and is fixed to the lower end portion of the piston 40 on the upper surface side of the central portion. That is, the valve body 30, the diaphragm 35, and the piston 40 are connected so as to be integrally formed in the housing 10. Deformation corresponding to the operation of.
The peripheral portion of the diaphragm 35 is fitted between the upper block having the piston 40 and the lower block, and completely separates the upper space 13 forming a part of the flow path from the portion provided with the piston 40 and the like. This prevents the fluid from leaking to the piston 40 side.
[0027]
The piston 40 is formed to have a shaft portion 40a downward from the center of the disk portion, and the lower end of the shaft portion 40a is connected to the diaphragm 35 as described above. Above the disk portion, a first pressure chamber 20 for taking in air (operating fluid) introduced from the first pressure introduction port 22 (valve guiding means) is formed. The upper surface of the piston 40 forms an upper pressure receiving surface 40b.
A second pressure chamber 21 for taking in air (operating fluid) introduced from the second pressure introduction port 23 (valve guiding means) is formed below the disk portion. The lower surface of the piston 40 forms a lower pressure receiving surface 40c.
A recess is formed in the outer periphery of the disk portion of the piston 40, and an O-ring 41 for preventing pressure leakage between the first pressure chamber 20 and the second pressure chamber 21 is fitted into the recess. Have been.
[0028]
When air is introduced from the first pressure introduction port 22 installed on the upper surface of the housing 10, the air fills the first pressure chamber 20. As a result, air pressure acts on the upper pressure receiving surface 40b of the piston 40, and the piston 40 is pushed downward as shown in FIG. When the piston 40 moves downward, the valve body 30 connected to the piston moves downward, the first valve seat 31 is opened, and further moves downward to be in close contact with the second valve seat 32. Then, the opening is closed.
[0029]
Therefore, the fluid introduced from the inlet port 11 passes through the valve chamber 12, does not enter the lower space 16, flows only into the upper space 13, passes through the first throttle passage 14 from the upper space 13, and exits through the outlet port. Flow into 15. Of course, the minimum flow path area in such a flow exists in the first throttle flow path 14, and the flow rate and pressure of the fluid are adjusted according to the throttle diameter of φ8.5 mm.
[0030]
Further, when air is introduced from the second pressure introduction port 23 provided on the side surface (right side surface of the paper) of the housing 10, the air is filled into the second pressure chamber 21 corresponding to the lower side of the piston 40. As a result, air pressure acts on the lower pressure receiving surface 40c of the piston 40, and the piston 40 is pushed upward as shown in FIG. When the piston 40 moves upward, the valve body 30 connected to the piston moves upward, the second valve seat 32 opens, and moves further upward to come into close contact with the first valve seat 31. Then, the opening is closed.
[0031]
Therefore, the fluid introduced from the inlet port 11 passes through the valve chamber 12, does not enter the upper space 13, flows only into the lower space 16, and further flows from the lower outer peripheral space 17 through the second throttle passage 18. It flows into the outlet port 15. Of course, the minimum flow path area in such a flow exists in the second throttle flow path 18, and the flow rate and pressure of the fluid are adjusted according to the throttle diameter of φ1.0 mm.
[0032]
As described above, according to the flow control device 1 described in the present embodiment, the piston 40 is operated by a remote operation using two systems of air, whereby one of the two throttle channels 14 and 18 is operated. Can be appropriately selected and sent out from the same outlet port 15, and the restriction of the flow rate and pressure can be changed easily and at a remote position. Further, since the fluid is passed through the throttle channels 14 and 18 having a fixed throttle diameter, the flow rate adjustment and the like can be performed accurately and stably.
[0033]
Note that the flow rate adjusting device shown in the present embodiment is an embodiment of the present invention, and is not to be construed as being limited thereto, but may have a configuration described below as a modification.
An outlet port 15 is provided on the outer peripheral portion of the housing 10, for example, one at the front side and one at the back side along the vertical direction in FIG. And, in the flow paths connected to each of these outlet ports, two throttle flow paths connected from the valve chamber 12 as described above are provided. Of course, the aperture diameter of each aperture channel is arbitrarily set according to the use situation.
[0034]
If a valve is provided on the circuit connected to each outlet port, one of the throttle channels selected from the outlet port connected to the valve opened in each valve. Will be delivered in a state where the flow rate and the like have been adjusted, and no fluid will be delivered from the outlet port to which the other closed valves are connected.
That is, in the former outlet port, fluid is delivered by selecting one of the two restricting passages that communicate with the outlet port in accordance with the operation of the piston 40. In this case, each of the two throttle channels that communicate with each other does not function, and the fluid is held.
Further, when the open position of the valve is changed, the fluid that has passed through one of the two throttle channels that are connected to the outlet port to which the opened valve is connected is sent out. If the diameter of the throttle at this time is different from the others, the fluid is delivered according to the diameter of the throttle.
Therefore, it is possible to realize a flow rate adjusting device that improves versatility in performing accurate flow rate adjustment and the like while branching the fluid and sending out the fluid.
[0035]
Further, as in the above-described embodiment, a configuration may be employed in which a plurality of outlet ports 15 are provided, and a throttle channel is provided to communicate with all of the plurality of outlet ports. That is, it is possible to introduce a configuration in which the supply destination of the fluid that has passed through the throttle passages 14 and 18 shown in each drawing can be easily changed by opening and closing a valve provided on the downstream side of each outlet port. Such a configuration is particularly effective when there is no need to adjust the flow rate by providing many throttle channels, and when there are a plurality of fluid supply destinations.
[0036]
As another modified example, the guidance of the piston 40 is based on the introduction of air as described above, and the other is based on the spring. That is, while the piston 40 is brought into close contact with one of the valve seats by the spring, air that can oppose the valve seat is introduced to open the valve seat closed by the elastic force of the spring.
According to this, the number of pressure introduction ports for introducing air can be reduced.
[0037]
Further, the example in which the piston 40 mainly constitutes the valve body guiding means according to the present invention has been described, but a configuration using only the diaphragm may be used. For example, a diaphragm provided so as to close one of the valve seats is urged to deform by pressure, and the valve body is moved. Alternatively, air is introduced into the upper and lower surfaces of the diaphragm to deform the diaphragm upward or downward, and to guide a valve body connected thereto.
According to this, it is suitable for adjusting the flow rate of a fluid flowing at a low flow rate or a low pressure, and the structure can be simplified and the size can be reduced.
[0038]
[Second embodiment]
Next, a second embodiment of the flow control device of the present invention will be described with reference to FIGS. Note that the configuration of the present embodiment is different from the configuration of the first embodiment in the structure and configuration of the throttle channel. Therefore, the different points will be described in detail, and the same reference numerals will be given to the same configurations. The description will be partially omitted.
[0039]
In the flow control device 1 according to the present embodiment, a thread groove is formed on the inner wall surface of the first throttle passage 14 (see FIG. 1) described in the first embodiment, and the thread is engaged with the thread groove. The aperture adapter 19 (aperture diameter changing means) shown in FIG.
The aperture adapter 19 has a screw portion 19b formed on the outer periphery thereof, and a through hole 19a formed with a predetermined aperture diameter inside the screw adapter 19b. A groove 19c for contacting a flathead screwdriver is formed at an end of the aperture adapter 19, and the groove 19c is orthogonal to the axial direction of the through hole 19a.
[0040]
Now, when such a throttle adapter 19 is installed in the flow path, the flow path leading to it functions as a throttle flow path, and when the fluid passes through the through hole 19a in the throttle adapter 19, Adjustment of flow rate and pressure is performed.
[0041]
A plurality of aperture adapters 19 are prepared, and the outer circumferences thereof are formed in the same shape in common, and the diameters of these through holes 19a, that is, the aperture diameters are φ3.0 mm, φ4.0 mm, It is formed differently, such as φ0.5 mm. Therefore, when each of the diaphragm adapters 19 is replaced, the fluid passing therethrough is appropriately adjusted according to the diaphragm diameter of the replaced diaphragm adapter 19.
[0042]
Although the aperture adapter 19 is installed at the time of assembling the apparatus, the aperture adapter 19 can be replaced after the assembly.
As shown in the first embodiment, each throttle channel is formed in order to prepare two throttle diameters required for normal use. However, as described in the present embodiment, a change in the aperture diameter itself can be handled by exchanging the aperture adapter 19, and therefore, a common shape for attaching the aperture adapter 19 is provided to meet the needs of the user. By attaching the throttle adapter 19 having the required throttle diameter, the required range of flow adjustment and the like can be expanded.
[0043]
The following may be a modification of the aperture adapter.
As in the previous embodiment, a thread is formed on the outer periphery of the aperture adapter. Then, as a change point, the diaphragm adapter is formed in a cylindrical shape having a wall surface at one end side and having a hollow inside thereof. The shape of the hollow portion is a shape into which a hexagon wrench is fitted, and a through hole is formed in a wall surface on one end side. The diameter of this through hole is formed in consideration of the diameter of the throttle channel. It goes without saying that the hollow portion is formed corresponding to the hexagon wrench for tightening and removing the aperture adapter 19.
[0044]
According to the flow rate adjusting device 1 according to the present embodiment described above, a large number of flow rate adjusting devices 1 capable of coping with various required flow rates and pressure adjustments can be manufactured in common, thereby reducing manufacturing costs. be able to. Further, since the diameter of the throttle is fixed, accurate and stable flow rate adjustment and the like can be performed while enabling exchange.
Further, it is possible to provide a highly versatile flow control device 1 that can respond to various requests for flow control and the like with one device.
[0045]
In the present embodiment, the case where the throttle adapter is provided in one of the two flow paths that conduct to the outlet port 15 has been described, but the throttle adapter may be provided on the second throttle flow path 18 side.
[0046]
[Third Embodiment]
Next, a third embodiment of the flow control device of the present invention will be described with reference to FIG. The configuration of the present embodiment is provided with a configuration for guiding the valve body 30 to the neutral position as compared with the configuration of the first embodiment. Therefore, this point will be described in detail, and other similar configurations will be described. The components are denoted by the same reference numerals, and the description thereof will be partially omitted.
[0047]
In the flow control device 1 according to the present embodiment, the first pressure introduction port 22 described in the first embodiment is located on the side surface of the housing 10, and is located on the upper surface of the housing 10, that is, above the piston 40. Is provided with a lock dial 50. The body of the lock dial 50 is formed with a screw portion 50b which is screwed into a female screw portion of a hole formed on the housing side, and by rotating the disk-shaped operation portion 50a, an arbitrary position in the vertical direction is formed. It is possible to fix with.
[0048]
In the state shown in FIG. 5, the lock dial 50 is tightened, and the disc-shaped operation portion 50 a is fixed by being in contact with the upper end surface of the housing 10. When the air is supplied from the second pressure introduction port 23, the pressure of the air acts on the lower pressure receiving surface 40c of the piston 40. Then, the piston 40 moves upward. However, when the upper pressure receiving surface 40b of the piston 40 contacts the lower end portion 50c of the lock dial 50, the piston 40 cannot move upward.
[0049]
As a result, the valve body 30 connected to the lower end of the piston 40 is located between the first valve seat 31 and the second valve seat 32 in the moving direction of the valve body 30, and the inlet port The fluid that has flowed in from 11 passes through the openings of both valve seats 31 and 32, and passes through the first throttle channel 14 and the second throttle channel 18, respectively. Therefore, the fluid that has passed through the two throttle channels 14 and 18 and merged is equivalent to having passed through the throttle channel that is the sum of the two throttle areas. The flow is controlled, and is sent out from the outlet port 15.
[0050]
Although the valve element 30 is in an unstable state because it is located between the two valve seats 31 and 32, the position of the piston 40 is fixed by always supplying air from the second pressure introduction port 23. Therefore, the valve body 30 connected to the valve body 30 can secure a stable state without being influenced by the flow of the fluid.
[0051]
According to the flow control device 1 according to the present embodiment described above, a new throttle flow path can be guided using the neutral state of the valve element 30, and the setting range of flow control can be expanded.
It should be noted that each of the throttle passages 14 and 18 shown in this drawing may be provided with the throttle adapter 19 (throttle diameter changing means) described in the above embodiment.
[0052]
【The invention's effect】
As described above, according to the flow control device of the present invention, the following effects can be obtained.
According to the flow control device according to the first aspect of the present invention, in the housing, the inlet port of the fluid, the outlet port, the flow path connecting these ports, and the valve disposed between the flow path A plurality of throttle channels that open toward the outer periphery of the valve body and communicate with the outlet port, and guide movement of the valve body to guide fluid to the outlet port using at least one of the throttle channels. Since the valve body guiding means is provided, the fluid can be delivered from the same outlet port according to various prepared throttle diameters without removing the device from the circuit. Therefore, the flow of the fluid can be easily and accurately changed and controlled using the fixed throttle.
[0053]
According to the invention described in claim 2, the fluid inlet port, the outlet port, the flow path connecting these ports, the valve element disposed between the flow paths, and the operation of the valve element A first valve seat and a second valve seat which are opened or closed, and two throttle flows which form a part of the flow path which has a predetermined throttle diameter between these valve seats and the outlet port, and which communicates with each other; And the valve body guiding means for guiding the valve body to each valve seat, so that the flow introduced from the inlet port is adjusted by using at least one of the two throttles. The pressure of the fluid introduced from the inlet port can be appropriately increased while the pressure of the fluid sent from the outlet port is adjusted using at least one of the two throttles, and the fluid can be sent from the same outlet port. In addition, since the diameter of the throttle through which the fluid passes can be changed in the apparatus, the work of changing the throttle on a circuit including the present apparatus becomes easy. In addition, since it is a fixed throttle provided in the throttle channel, high accuracy in flow rate adjustment and pressure adjustment can be secured.
[0054]
According to the third aspect of the present invention, since a plurality of outlet ports are provided, the supply destination is changed while the flow rate is adjusted using two throttles per one outlet port, and the fluid whose flow rate is adjusted is controlled. It can be easily supplied to any of a plurality of required supply destinations. As a result, it is possible to perform more various flow adjustments and the like, and the versatility of the present apparatus can be further improved.
[0055]
According to the invention described in claim 4, the valve body guiding means is configured to have the piston that moves in the same direction as the moving direction of the valve body in accordance with the pressure of the operation fluid supplied from the outside. The valve element can be operated accurately without waste according to the pressure of the operating fluid. Further, the structure for moving the valve element is simplified, and the apparatus can be made compact.
[0056]
According to the fifth aspect of the present invention, since the seal member serving as the partition wall of the flow path is provided between the valve body and the valve body guiding means, the partition between them can be easily configured. The operation of the valve body guiding means can be transmitted to the valve body. Therefore, it is possible to reduce the cost when configuring the valve body guiding means.
[0057]
According to the invention described in claim 6, since the throttle flow path is provided with the throttle diameter changing means for changing the throttle diameter, even when the flow rate of the fluid is adjusted using the same throttle flow path, The flow rate can be adjusted in various ways by changing the diameter of the throttle channel. Therefore, it is possible to improve the versatility by expanding the setting range of the flow rate adjustment and the like of the apparatus, and to realize the flow rate adjustment apparatus at low cost according to the common use. Can be.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view illustrating an internal configuration and a structure of a flow rate adjusting device according to a first embodiment of the present invention, showing a state in which a fluid is circulated using a throttle channel having a large throttle diameter. I have.
FIG. 2 is a cross-sectional view illustrating an internal configuration and a structure of the flow rate adjusting device according to the first embodiment of the present invention, showing a state in which a fluid is circulated using a throttle channel having a small throttle diameter. I have.
FIG. 3 is a cross-sectional view illustrating a configuration and a structure of a flow rate adjusting device according to a second embodiment of the present invention.
FIGS. 4A and 4B are diagrams illustrating the structure of the diaphragm diameter changing means according to the present invention, wherein FIG. 4A is a partial cross-sectional view, and FIG. 4B is a bottom view of FIG.
FIG. 5 is a sectional view illustrating a configuration and a structure of a flow control device according to a third embodiment of the present invention.
[Explanation of symbols]
1 Flow control device
10 Housing
11 entrance port
12 Valve room (flow path)
13 Upper space (flow path)
14 First throttle channel
15 Exit port
16 Lower space (flow path)
17 Lower outer space (flow path)
18 Second throttle channel
19 Aperture adapter (Aperture diameter changing means)
20 1st pressure chamber
21 Second pressure chamber
22 First pressure introduction port (valve guiding means)
23 Second pressure introduction port (valve guiding means)
30 valve body
31 1st valve seat
32 Second valve seat
35 Diaphragm (seal member)
40 piston (valve guiding means)
50 Lock dial

Claims (6)

In the housing, a fluid inlet port, a fluid outlet port, a flow path connecting these ports, a valve disposed between the flow paths, and an outlet facing the outer periphery of the valve and opening the outlet. A plurality of throttle channels forming a part of the channel communicating with a port, and valve body guiding means for guiding movement of the valve body to guide a fluid to an outlet port using at least one of the throttle channels; A flow control device characterized by comprising: In the housing, a fluid inlet port, a fluid outlet port, a flow path connecting these ports, a valve element disposed between the flow paths, and a first valve that opens or closes according to the operation of the valve element. A valve seat, a second valve seat, two throttle channels which form a part of the flow channel having a predetermined throttle diameter between the valve seat and the outlet port, and each of the valves Flow rate adjusting means, comprising: valve body guiding means for guiding the valve body with respect to a seat. The flow control device according to claim 1, wherein a plurality of the outlet ports are provided on an outer peripheral portion of the housing. The said valve body guidance means has the piston which moves in the same direction as the moving direction of the said valve body according to the pressure of the operating fluid supplied from the outside, The Claims 1 to 3 characterized by the above-mentioned. The flow control device according to any one of claims 1 to 4. The flow rate according to any one of claims 1 to 4, wherein a seal member forming a partition wall of the flow path is provided between the valve body and the valve body guiding means. Adjustment device. The flow rate adjusting device according to any one of claims 1 to 5, wherein the throttle flow path is provided with a throttle diameter changing unit that changes a throttle diameter.

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