JPS5865382A - Variable constant flow ratio mixing device - Google Patents

Abstract

PURPOSE:To perform the predetermined flow ratio mixing and to enable the flow regulation, by feeding two kinds of gas to a dividing selector through a diaphragm regulator then feeding through a thin pipe group to a mixing section and taking out of said section. CONSTITUTION:It is controlled such that the primary pressure of the second gas 3 and the pressure 14 of the first gas 2 will be equalized. Upon rotation of a selector cock to the direction (a), for example, the number of the thin pipe groups 71-75 connecting to the first gas path 2 will increase while the number of communication with the second gas path 3 will decrease. Consequently the mixing ratio of the first and second gas 2, 3 flowing into the mixing section 8 can be controlled to the predetermined ratio. The mixed gas is taken out from the mixing section 8 through a throttle 10. Since it is mixed with the ratio to be determined by the number of the thin pipe groups 71-75 at the upstream of the throttle 10, the desired mixing ratio can be maintained even when the flow is regulated by the throttle 10.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides an apparatus for mixing two dissimilar gases, in particular a device that can be switched to a predetermined desired flow rate ratio in a single operation, and that once the flow rate ratio is set, the flow rate ratio This device relates to a variable constant flow ratio mixing device that can vary the flow rate of mixed gas without keeping it constant.It has a simple structure with a small number of parts, and can mix any flow rate at a desired constant flow rate as described above. The main objective is to provide a mixing device capable of supplying gas.

First, one embodiment of the present invention will be described based on the drawings. In the figure, 1 is a block in which a first gas flow path 2 and a second gas flow path 3 are formed, and a regulator 4 is installed therein; 5 is a dividing switch 6; a group of thin tubes 71; 2. 3. 4. 5 and a mixing section 8 inside. Both blocks 1 and 5 are connected and fixed so that the first gas flow path 2 and the second gas flow path 3 communicate with each other.

A first gas is supplied to the first gas passage 2, and a second gas is supplied to the second gas passage 3 through pumps PL and P2, respectively.

The regulator 4 is interposed between both flow paths 2.3,
As will be explained in detail later, an adjustment operation is performed to equalize the gas pressures in both channels 2.3. The split switch 6 has a structure in which a rotor that rotates while sliding is provided on the plot 5 by operating a switch cock (not shown), and the block 5 side has an outlet port 2' of the first gas flow path 2, The outlet boat 3' of the second gas flow path 3 and the group of thin tubes 71, 2 of the same shape and size
, 3, 4, 5 entrance ports)? 'l, 2, 3, 4.5 are arranged in a circular shape, and two semicircular grooves 9a, 9b having the same radius as these are formed on the rotor side. One semicircular groove 9 m closes the first gas flow path 2 or communicates with a part or all of the thin tube group 71 .
b communicates the second gas flow path 3 with the remaining thin tube group. In the illustrated state, the first gas flow path 2 communicates with two thin tubes 71 and 72, and the second gas flow path 3 communicates with the remaining 13 thin tubes. 3,7
It is connected to 4.75. As the switching cock is rotated in the direction of arrow 3 from the illustrated state, the number of thin tube groups communicating with the first gas flow path 2 increases, and the number of thin tube groups communicating with the second gas flow path 3 increases. It decreases in response to. On the other hand, when the switching cock is rotated in the opposite direction to the arrow turtle, the number of thin tube groups communicating with the first gas flow path 2 decreases, and the number of thin tube groups communicating with the second gas flow path 3 decreases. increase. In this case, although the gases that have been switched individually flow in the thin tubes, the number of thin tubes and the gas flow rate are proportional to each combination. Therefore, by operating the switching cock, the flow rate ratio of the first gas and the second gas can be varied. Said thin tube 71. 2. 3. 4
．． The outlet side of 5 is centrally connected to a mixing section 8 .

Therefore, each capillary 71. 2. 3. 4. The gases 51 that have flowed in are mixed in the mixing section 8 and are discharged to the outside through the throttle 1o. Note that the diaphragm 1o does not have to be in the illustrated position.
For example, it can also be provided on the upstream side of the second gas flow path 3. Also, although not shown, the entrance port of each capillary) 7'l,
2. As near 4 and 5 - If an appropriate filter is provided, it is convenient to be able to filter out the scraping dust and the like generated in the dividing switch 6.

The regulator 4 communicates with the second gas flow path 3 through the passage 11, and thereby communicates with the primary side chamber 12 into which the primary pressure of the second gas is introduced, through the first gas flow path 2 and the passage 13. A secondary chamber 14 into which the pressure of the first gas on the downstream side of the regulator 4 is introduced, a diaphragm 15 that responds to the differential pressure between the two chambers 12 and 14, and a diaphragm 15 that responds to the pressure difference between the two chambers 12 and 14; It is composed of a pilot valve 16 that adjusts the opening degree.

The regulator 4 having this configuration controls the primary pressure of the fourth gas and the pressure of the first gas downstream of the regulator 4 to be the same pressure.

Said tubule group? Since tubes 1, 2, 3, and 4.5 all have the same shape and size, when the flow rate is changed by the throttle 10, the flow rate of each capillary changes at the same rate.

Therefore, the flow rate ratio of the gases flowing through both gas flow paths 2 and 3 is always kept constant.

Furthermore, even if the capillary tubes are configured with different shapes and sizes, within the range of small flow rates where gas flows in a laminar state within each capillary, the flow rate of the i-tubules will change at the same rate as shown in the table above. However, the gas flow rate ratio is kept constant.

As explained above, the variable constant flow ratio mixing device according to the present invention includes a first gas flow path, a second gas flow path, a regulator interposed between these two flow paths, and a downstream side of the regulator. It consists of a thin tube group that is selectively connected to the side via a dividing switch, and a mixing section provided downstream of this thin tube group, and the regulator is connected to the primary pressure of the second gas into which the primary pressure is introduced. a side chamber, a secondary side chamber into which the pressure of the first gas downstream of the regulator is introduced, a diaphragm that responds to the differential pressure between the two chambers, and the opening of the first gas flow path is adjusted by the response of the diaphragm. Since the gist is that it is composed of a pilot valve, the flow rate ratio of the first gas and the second gas can be varied by the split switch, and
Due to the operation of the regulator, the downstream side of the regulator! By keeping the pressure of the first gas equal to the primary pressure of the second gas, the flow rate ratio set by the division switch can be kept constant.

Therefore, according to the mixing device of the present invention, two different gases can be mixed at a desired flow rate ratio, and the mixed gas having a predetermined flow rate ratio can be supplied at an appropriate flow rate. Furthermore, since only a small number of parts such as a regulator, a dividing switch, a thin tube, and a mixing section are required, the structure is simple.

[Brief explanation of drawings]

The figure is a sectional view of a mixing device as an embodiment of the present invention. 2...First gas flow path, 3...Second gas flow path, 4...
・Regulator, 6... Division switch, 71, 2, 3,
4. S... Thin tube group, 8... Mixer, 12... - secondary copper chamber, 14... Secondary side chamber, 15... Diaphragm,
16...Pilot valve.

Claims (1)

[Claims] A first gas flow path, a second gas flow path, a regulator interposed between these flow paths, and an equal shape that is selectively connected via a number division switch on the downstream side of the regulator; The regulator is composed of a group of thin tubes having the same size and a mixing section provided on the downstream side of the group of thin tubes, and the regulator has a primary side chamber into which the primary pressure of the second gas is introduced, and a chamber where the pressure of the first gas downstream of the regulator is A variable gas pump comprising: a secondary side chamber to be introduced; a diaphragm that responds to the differential pressure between the two chambers; and a pilot valve that adjusts the opening of the g/sl gas flow path in response to the response of the diaphragm. Constant flow ratio mixing device.