JPH01184925A - 洗浄装置および洗浄方法 - Google Patents

洗浄装置および洗浄方法

Info

Publication number
JPH01184925A
JPH01184925A JP63009848A JP984888A JPH01184925A JP H01184925 A JPH01184925 A JP H01184925A JP 63009848 A JP63009848 A JP 63009848A JP 984888 A JP984888 A JP 984888A JP H01184925 A JPH01184925 A JP H01184925A
Authority
JP
Japan
Prior art keywords
cleaning
substrate
carrier
window
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63009848A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435900B2 (enrdf_load_stackoverflow
Inventor
Ichiro Nakao
中尾　一郎
Teruto Onishi
照人 大西
Yuichi Hirofuji
裕一 広藤
Yoshitaka Dansui
慶孝 暖水
Motomitsu Suzuki
鈴木　基光
Yoshiyuki Shimizu
清水　賀之
Mitsuyasu Nagahama
長浜　光泰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63009848A priority Critical patent/JPH01184925A/ja
Publication of JPH01184925A publication Critical patent/JPH01184925A/ja
Publication of JPH0435900B2 publication Critical patent/JPH0435900B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP63009848A 1988-01-20 1988-01-20 洗浄装置および洗浄方法 Granted JPH01184925A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63009848A JPH01184925A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63009848A JPH01184925A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Publications (2)

Publication Number Publication Date
JPH01184925A true JPH01184925A (ja) 1989-07-24
JPH0435900B2 JPH0435900B2 (enrdf_load_stackoverflow) 1992-06-12

Family

ID=11731552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63009848A Granted JPH01184925A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Country Status (1)

Country Link
JP (1) JPH01184925A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006295091A (ja) * 2005-04-07 2006-10-26 Tsukishima Kankyo Engineering Ltd 基板の洗浄方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006295091A (ja) * 2005-04-07 2006-10-26 Tsukishima Kankyo Engineering Ltd 基板の洗浄方法

Also Published As

Publication number Publication date
JPH0435900B2 (enrdf_load_stackoverflow) 1992-06-12

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