JPH01158450A - マスクの欠陥修正方法 - Google Patents

マスクの欠陥修正方法

Info

Publication number
JPH01158450A
JPH01158450A JP63272967A JP27296788A JPH01158450A JP H01158450 A JPH01158450 A JP H01158450A JP 63272967 A JP63272967 A JP 63272967A JP 27296788 A JP27296788 A JP 27296788A JP H01158450 A JPH01158450 A JP H01158450A
Authority
JP
Japan
Prior art keywords
mask
ion beam
defect
defects
defect part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63272967A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0375855B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Takeoki Miyauchi
宮内　建興
Mikio Hongo
幹雄 本郷
Masao Mitani
正男 三谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63272967A priority Critical patent/JPH01158450A/ja
Publication of JPH01158450A publication Critical patent/JPH01158450A/ja
Publication of JPH0375855B2 publication Critical patent/JPH0375855B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02D—CONTROLLING COMBUSTION ENGINES
    • F02D9/00—Controlling engines by throttling air or fuel-and-air induction conduits or exhaust conduits
    • F02D9/08—Throttle valves specially adapted therefor; Arrangements of such valves in conduits
    • F02D9/10—Throttle valves specially adapted therefor; Arrangements of such valves in conduits having pivotally-mounted flaps
    • F02D9/109—Throttle valves specially adapted therefor; Arrangements of such valves in conduits having pivotally-mounted flaps having two or more flaps
    • F02D9/1095—Rotating on a common axis, e.g. having a common shaft
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/748—Machines or parts thereof not otherwise provided for
    • B29L2031/7506—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02D—CONTROLLING COMBUSTION ENGINES
    • F02D9/00—Controlling engines by throttling air or fuel-and-air induction conduits or exhaust conduits
    • F02D9/08—Throttle valves specially adapted therefor; Arrangements of such valves in conduits
    • F02D9/10—Throttle valves specially adapted therefor; Arrangements of such valves in conduits having pivotally-mounted flaps
    • F02D9/107—Manufacturing or mounting details

Landscapes

  • Engineering & Computer Science (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
JP63272967A 1988-10-31 1988-10-31 マスクの欠陥修正方法 Granted JPH01158450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63272967A JPH01158450A (ja) 1988-10-31 1988-10-31 マスクの欠陥修正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63272967A JPH01158450A (ja) 1988-10-31 1988-10-31 マスクの欠陥修正方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP61213821A Division JPS6285253A (ja) 1986-09-12 1986-09-12 マスクの欠陥修正方法

Publications (2)

Publication Number Publication Date
JPH01158450A true JPH01158450A (ja) 1989-06-21
JPH0375855B2 JPH0375855B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-03

Family

ID=17521286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63272967A Granted JPH01158450A (ja) 1988-10-31 1988-10-31 マスクの欠陥修正方法

Country Status (1)

Country Link
JP (1) JPH01158450A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2025320A1 (fr) 2007-08-10 2009-02-18 L'Oréal Ensemble de conditionnement et d'application d'un vernis à ongles de viscosité élevée

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2025320A1 (fr) 2007-08-10 2009-02-18 L'Oréal Ensemble de conditionnement et d'application d'un vernis à ongles de viscosité élevée

Also Published As

Publication number Publication date
JPH0375855B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-03

Similar Documents

Publication Publication Date Title
JPS627540B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP0298495B1 (en) Method and apparatus for correcting defects of x-ray mask
JPH07122484A (ja) 電子線描画装置のパターン修正装置におけるパターン修正方法
JPS59208830A (ja) イオンビ−ム加工方法およびその装置
JPH0428097B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US5180919A (en) Electron beam exposure system having the capability of checking the pattern of an electron mask used for shaping an electron beam
JPH01158450A (ja) マスクの欠陥修正方法
JPH01154064A (ja) 微細パターンの形成方法
JPS6339894B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH04251254A (ja) イオンビーム加工方法
JPS6285253A (ja) マスクの欠陥修正方法
JPS60126834A (ja) イオンビーム加工装置
JP2672808B2 (ja) イオンビーム加工装置
JP3168032B2 (ja) 電子ビーム露光装置及び描画パターンを検査する方法
JPH0260A (ja) イオンビーム加工装置
JP2590703B2 (ja) イオンビーム加工装置
JPS6251218A (ja) 電子線描画装置
JP2006093579A (ja) マスク検査装置、マスク検査方法及び電子ビーム露光装置
JP2910936B2 (ja) 電子ビーム露光装置
JPS6184833A (ja) マスクパタ−ン欠陥検査修正装置
JPS6186753A (ja) マスク欠陥修正終了検出方法
JPS59169133A (ja) パタ−ン修正装置
JPS6065532A (ja) イオンビ−ムによるマスクリペア−装置
JPS59152623A (ja) 荷電粒子線露光方法
JPH0218561A (ja) 集束イオンビーム装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees