JPH0110924Y2 - - Google Patents

Info

Publication number
JPH0110924Y2
JPH0110924Y2 JP1981096861U JP9686181U JPH0110924Y2 JP H0110924 Y2 JPH0110924 Y2 JP H0110924Y2 JP 1981096861 U JP1981096861 U JP 1981096861U JP 9686181 U JP9686181 U JP 9686181U JP H0110924 Y2 JPH0110924 Y2 JP H0110924Y2
Authority
JP
Japan
Prior art keywords
wafer
processing liquid
supplied
supply port
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981096861U
Other languages
English (en)
Japanese (ja)
Other versions
JPS585342U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9686181U priority Critical patent/JPS585342U/ja
Publication of JPS585342U publication Critical patent/JPS585342U/ja
Application granted granted Critical
Publication of JPH0110924Y2 publication Critical patent/JPH0110924Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP9686181U 1981-06-30 1981-06-30 ウェハ−表面処理装置 Granted JPS585342U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9686181U JPS585342U (ja) 1981-06-30 1981-06-30 ウェハ−表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9686181U JPS585342U (ja) 1981-06-30 1981-06-30 ウェハ−表面処理装置

Publications (2)

Publication Number Publication Date
JPS585342U JPS585342U (ja) 1983-01-13
JPH0110924Y2 true JPH0110924Y2 (enrdf_load_stackoverflow) 1989-03-29

Family

ID=29891688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9686181U Granted JPS585342U (ja) 1981-06-30 1981-06-30 ウェハ−表面処理装置

Country Status (1)

Country Link
JP (1) JPS585342U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129283U (enrdf_load_stackoverflow) * 1985-02-01 1986-08-13
JPH0143863Y2 (enrdf_load_stackoverflow) * 1985-04-24 1989-12-19
JPS63135774U (enrdf_load_stackoverflow) * 1987-02-26 1988-09-06

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547115Y2 (enrdf_load_stackoverflow) * 1973-08-17 1979-04-03
JPS55124232A (en) * 1979-03-20 1980-09-25 Matsushita Electric Ind Co Ltd Application method of substrate treatment solution and the device therefor
JPS5660021A (en) * 1979-10-19 1981-05-23 Fujitsu Ltd Etching for semiconductor device

Also Published As

Publication number Publication date
JPS585342U (ja) 1983-01-13

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