JPH0143863Y2 - - Google Patents

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Publication number
JPH0143863Y2
JPH0143863Y2 JP1985060409U JP6040985U JPH0143863Y2 JP H0143863 Y2 JPH0143863 Y2 JP H0143863Y2 JP 1985060409 U JP1985060409 U JP 1985060409U JP 6040985 U JP6040985 U JP 6040985U JP H0143863 Y2 JPH0143863 Y2 JP H0143863Y2
Authority
JP
Japan
Prior art keywords
etching
substrate
etched
jetted
rotating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985060409U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61177443U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985060409U priority Critical patent/JPH0143863Y2/ja
Publication of JPS61177443U publication Critical patent/JPS61177443U/ja
Application granted granted Critical
Publication of JPH0143863Y2 publication Critical patent/JPH0143863Y2/ja
Expired legal-status Critical Current

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  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP1985060409U 1985-04-24 1985-04-24 Expired JPH0143863Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Publications (2)

Publication Number Publication Date
JPS61177443U JPS61177443U (enrdf_load_stackoverflow) 1986-11-05
JPH0143863Y2 true JPH0143863Y2 (enrdf_load_stackoverflow) 1989-12-19

Family

ID=30587730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985060409U Expired JPH0143863Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPH0143863Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101308352B1 (ko) * 2011-12-16 2013-09-17 주식회사 엘지실트론 매엽식 웨이퍼 에칭장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585342U (ja) * 1981-06-30 1983-01-13 富士通株式会社 ウェハ−表面処理装置

Also Published As

Publication number Publication date
JPS61177443U (enrdf_load_stackoverflow) 1986-11-05

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